Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

Abstract

Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report the first silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of > 60% across a record wavelength span from $\lambda$ ~400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 $\pm$ 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.

20 pages, 21 figures

References in corpus (6)

• Power-Efficient Silicon Nitride Thermo-Optic Phase Shifters for Visible Light
• MoSe2/WS2 heterojunction photodiode integrated with a silicon nitride waveguide for visible light detection with high responsivity
• Piezo-optomechanical cantilever modulators for VLSI visible photonics
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• Microcantilever-integrated photonic circuits for broadband laser beam scanning
• Near ultraviolet photonic integrated lasers based on silicon nitride

Cited by in corpus (8)

• Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuit
• Microcantilever-integrated photonic circuits for broadband laser beam scanning
• Programmable photonic integrated meshes for modular generation of optical entanglement links
• Chip-scale sub-Doppler atomic spectroscopy enabled by a metasurface integrated photonic emitter
• On-chip 7 GHz acousto-optic modulators for visible wavelengths
• Thermally Induced Refractive Index Trimming of Visible-Light Silicon Nitride Waveguides Using Suspended Heaters
• Broadband Waveguide-Coupled Photodetectors in a Submicrometer-Wavelength Silicon Photonics Platform
• Hybrid electrostatic-piezo MEMS photonic integrated modulators