Piezo-optomechanical cantilever modulators for VLSI visible photonics

Abstract

Visible-wavelength very large-scale integration (VLSI) photonic circuits have potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 V${}_{\pi }$-cm in differential operation, -1.5 dB to -2 dB insertion loss, and up to 40 dB contrast in the 700 nm - 780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 MHz and 6.8 MHz respectively, which through resonant enhancement of Q~40, further decreases the operating voltage down to 0.15 V${}_{\pi }$-cm.

13 pages, 6 figures, 3 supplementary figures

References in corpus (23)

• Universal Linear Optics
• Quantum Phases of Matter on a 256-Atom Programmable Quantum Simulator
• Parallel implementation of high-fidelity multi-qubit gates with neutral atoms
• Large-scale silicon quantum photonics implementing arbitrary two-qubit processing
• Quantum circuits with many photons on a programmable nanophotonic chip
• Quantum transport simulations in a programmable nanophotonic processor
• Self-Configuring Universal Linear Optical Component
• Large-scale integration of near-indistinguishable artificial atoms in hybrid photonic circuits
• Large-Scale Optical Neural Networks based on Photoelectric Multiplication
• Integrated multi-wavelength control of an ion qubit
• Ultra-low loss integrated visible photonics using thin-film lithium niobate
• Quantum networks based on color centers in diamond
• Nanophotonic Pockels modulators on a silicon nitride platform
• High-speed programmable photonic circuits in a cryogenically compatible, visible-NIR 200 mm CMOS architecture
• Reconfigurable electro-optic frequency shifter
• A Reconfigurable Nanophotonics Platform for Sub-Millisecond, Deep Brain Neural Stimulation
• MEMS for Photonic Integrated Circuits
• 8x8 Reconfigurable quantum photonic processor based on silicon nitride waveguides
• Hybrid Integrated Photonics Using Bulk Acoustic Resonators
• Power-Efficient Silicon Nitride Thermo-Optic Phase Shifters for Visible Light
• CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures
• Deterministic positioning of colloidal quantum dots on silicon nitride nanobeam cavities
• Analyzing and generating multimode optical fields using self-configuring networks

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• High-fidelity trapped-ion qubit operations with scalable photonic modulators
• Programmable photonic integrated meshes for modular generation of optical entanglement links
• An integrated photonic engine for programmable atomic control
• Modular chip-integrated photonic control of artificial atoms in diamond nanostructures
• Synchronous micromechanically resonant programmable photonic circuits
• Hybrid electrostatic-piezo MEMS photonic integrated modulators