Sputtered AlN buffer layer for low-loss crystalline AlN-on-sapphire integrated photonics

Abstract

In recent years, aluminum nitride (AlN) has emerged as an attractive material for integrated photonics due to its low propagation losses, wide transparency window, and presence of both second- and third-order optical nonlinearities. However, most of the research led on this platform has primarily focused on applications, rather than material optimization, although the latter is equally important to ensure its technological maturity. In this work, we show that voids, which are commonly found in crystalline AlN-on-sapphire epilayers, have a detrimental role in related photonic structures, as they can lead to propagation losses exceeding 30 dB cm${}^{-1}$ at 1550 nm. Their impact on light propagation is further quantified through finite-difference time-domain simulations that reveal that void-related scattering losses are strongly dependent on their size and density in the layer. As a possible solution, we demonstrate that when introducing a thin sputtered AlN buffer layer prior to initiating AlN epitaxial growth, void-free layers are obtained. They exhibit intrinsic quality factors in microring resonators as high as $2.0\times 10^6$, corresponding to propagation losses lower than 0.2 dB cm${}^{-1}$ at 1550 nm. These void-free layers are further benchmarked for high-power applications through second-harmonic and supercontinuum generation in dispersion-engineered waveguides. Such layers are highly promising candidates for short-wavelength photonic integrated circuit applications, particularly given the strong potential of AlN for visible photonics. Given that volumetric scattering losses scale as ${\lambda }^{-4}$, the platform quality becomes increasingly critical in the visible and ultraviolet range, where our improved layers are expected to deliver enhanced performance.

39 pages, 16 figures

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