Graphene on silicon nitride for optoelectromechanical micromembrane resonators

Abstract

Due to their exceptional mechanical and optical properties, dielectric silicon nitride (SiN) micromembrane resonators have become the centerpiece of many optomechanical experiments. Efficient capacitive coupling of the membrane to an electrical system would facilitate exciting hybrid optoelectromechanical devices. However, capacitive coupling of such dielectric membranes is rather weak. Here we add a single layer of graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene coated membranes is found to be equal to a perfectly conductive membrane. Our results show that a single layer of graphene substantially enhances the electromechanical capacitive coupling without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of SiN micromembrane resonators.

References in corpus (6)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Circuit cavity electromechanics in the strong coupling regime
• Cavity Optomechanics
• Optical detection of radio waves through a nanomechanical transducer
• Graphene on silicon nitride for optoelectromechanical micromembrane resonators
• Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration

Cited by in corpus (8)

• Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators
• Detecting Ultrasound Vibrations by Graphene Resonators
• Near-field integration of a SiN nanobeam and a SiO${}_2$ microcavity for Heisenberg-limited displacement sensing
• Figures of merit for quantum transducers
• Graphene on silicon nitride for optoelectromechanical micromembrane resonators
• Electro-optomechanical equivalent circuits for quantum transduction
• Spectrally Broadband Electro-Optic Modulation with Nanoelectromechanical String Resonators
• Active feedback cooling of a SiN membrane resonator by electrostatic actuation