High-Q optomechanical GaAs nanomembranes

Abstract

We present a simple fabrication method for the realization of suspended GaAs nanomembranes for cavity quantum optomechanics experiments. GaAs nanomembranes with an area of 1.36 mm by 1.91 mm and a thickness of 160 nm are obtained by using a two-step selective wet-etching technique. The frequency noise spectrum reveals several mechanical modes in the kilohertz regime with mechanical Q-factors up to 2,300,000 at room temperature. The measured mechanical mode profiles agree well with a taut rectangular drumhead model. Our results show that GaAs nanomembranes provide a promising path towards quantum optical control of massive nanomechanical systems.

3 pages, 3 figures

References in corpus (9)

• Laser cooling of a nanomechanical oscillator into its quantum ground state
• Sideband Cooling Micromechanical Motion to the Quantum Ground State
• Optomechanical entanglement between a movable mirror and a cavity field
• High frequency GaAs nano-optomechanical disk resonator
• Optomechanical coupling in a two-dimensional photonic crystal defect cavity
• Establishing EPR-channels between Nanomechanics and Atomic Ensembles
• Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap
• Monocrystalline AlGaAs heterostructures for high-reflectivity high-Q micromechanical resonators in the MHz regime
• Electromechanical wavelength tuning of double-membrane photonic crystal cavities

Cited by in corpus (18)

• Cavity Optomechanics
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• Frequency tuning, nonlinearities and mode coupling in circular graphene resonators
• Nanomechanical Dissipation and Strain Engineering
• Engineering the dissipation of crystalline micromechanical resonators
• Ultrahigh Q-Frequency product for optomechanical disk resonators with a mechanical shield
• Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics
• Tensile strained $I{n}_{x}G{a}_{1-x}P$ membranes for cavity optomechanics
• Acoustic Kerr nonlinearity of wave propagation in a planar nanoelectromechanical waveguide
• Sub-ppm Nanomechanical Absorption Spectroscopy of Silicon Nitride
• Damping of optomechanical disks resonators vibrating in air
• Ar/Cl${}_2$ etching of GaAs optomechanical microdisks fabricated with positive electroresist
• Optical refrigeration with coupled quantum wells
• Mechanically modulated emission spectra and blockade of polaritons
• Twisting Optomechanical Cavity
• Molecular-optomechanical phonon laser