Ultrahigh Q-Frequency product for optomechanical disk resonators with a mechanical shield

Abstract

We report on optomechanical GaAs disk resonators with ultrahigh quality factor - frequency product Qf. Disks standing on a simple pedestal exhibit GHz breathing modes attaining a Qf of 10^13 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation in this configuration. A new type of disk resonator integrating a shield within the pedestal is then proposed and its working principles and performances investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss-limited Q reaches 10^7-10^9 corresponding to Qf of 10^16-10^18. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.

4 pages, 1 table, 3 figures

References in corpus (12)

• Laser cooling of a nanomechanical oscillator into its quantum ground state
• Sideband Cooling Micromechanical Motion to the Quantum Ground State
• Cavity Optomechanical Magnetometer
• High frequency GaAs nano-optomechanical disk resonator
• Wavelength-sized GaAs optomechanical resonators with GHz frequency
• A microelectromechanically controlled cavity optomechanical sensing system
• Extremely Low-Loss Acoustic Phonons in a Quartz Bulk Acoustic Wave Resonator at Millikelvin Temperature
• High-Q silicon optomechanical microdisk resonators at gigahertz frequencies
• Monocrystalline AlGaAs heterostructures for high-reflectivity high-Q micromechanical resonators in the MHz regime
• High-Q optomechanical GaAs nanomembranes
• Critical optical coupling between a GaAs disk and a nanowaveguide suspended on the chip
• Damping of optomechanical disks resonators vibrating in air

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