Damping of optomechanical disks resonators vibrating in air

Abstract

We report on miniature GaAs disk optomechanical resonators vibrating in air in the radiofrequency range. The flexural modes of the disks are studied by scanning electron microscopy and optical interferometry, and correctly modeled with the elasticity theory for annular plates. The mechanical damping is systematically measured, and confronted with original analytical models for air damping. Formulas are derived that correctly reproduce both the mechanical modes and the damping behavior, and can serve as design tools for optomechanical applications in fluidic environment.

References in corpus (9)

• Laser cooling of a nanomechanical oscillator into its quantum ground state
• Sideband Cooling Micromechanical Motion to the Quantum Ground State
• Quantum Optomechanics - throwing a glance
• High frequency GaAs nano-optomechanical disk resonator
• Wavelength-sized GaAs optomechanical resonators with GHz frequency
• Modeling Dispersive Coupling and Losses of Localized Optical and Mechanical Modes in Optomechanical Crystals
• Fluctuating nanomechanical systems in a high finesse optical microcavity
• GHz optomechanical resonators with high mechanical Q factor in air
• High-Q optomechanical GaAs nanomembranes

Cited by in corpus (6)

• High frequency nano-optomechanical disk resonators in liquids
• Cavity optomechanics in gallium phosphide microdisks
• Origin of optical losses in gallium arsenide disk whispering gallery resonators
• Ultrahigh Q-Frequency product for optomechanical disk resonators with a mechanical shield
• Directional emission in an on-chip acoustic waveguide
• Fluid-structure model for disks vibrating at ultra-high frequency in a compressible viscous fluid