High bandwidth on-chip capacitive tuning of microtoroid resonators

Abstract

We report on the design, fabrication and characterization of silica microtoroid based cavity opto-electromechanical systems (COEMS). Electrodes patterned onto the microtoroid resonators allow for rapid capacitive tuning of the optical whispering gallery mode resonances while maintaining their ultrahigh quality factor, enabling applications such as efficient radio to optical frequency conversion, optical routing and switching applications.

11 pages, 7 figures

References in corpus (5)

• Ultrasensitive optical magnetometry at the microscale
• High frequency nano-optomechanical disk resonators in liquids
• Tunable frequency combs based on dual microring resonators
• Laser cooling and control of excitations in superfluid helium
• Electrostatic actuation of silicon optomechanical resonators

Cited by in corpus (8)

• Injection locking of an electro-optomechanical device
• On-chip thermo-optic tuning of suspended microresonators
• Free spectral range electrical tuning of a high quality on-chip microcavity
• Electro-mechanical control of an on-chip optical beam splitter containing an embedded quantum emitter
• An opto-electro-mechanical system based on evanescently-coupled optical microbottle and electromechanical resonator
• Modelling of vorticity, sound and their interaction in two-dimensional superfluids
• Optically tunable photoluminescence and upconversion lasing on a chip
• Fully reconfigurable optomechanical add-drop filters