On-chip thermo-optic tuning of suspended microresonators

Abstract

Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demand the capability to tune the optical resonances in an integrated manner. Here, we design and experimentally demonstrate integrated on-chip thermo-optic tuning of suspended microresonators by utilizing suspended wire bridges and microheaters. We demonstrate the ability to tune the resonance of a suspended microresonator in silicon nitride platform by 9.7 GHz using 5.3 mW of heater power. The loaded optical quality factor (QL ~ 92,000) stays constant throughout the detuning. We demonstrate the efficacy of our approach by completely turning on and off the optical coupling between two evanescently coupled suspended microresonators.

12 pages, 10 figures

References in corpus (6)

• Near-field radiative heat transfer between nanostructures in the deep sub-wavelength regime
• Synchronization and Phase Noise Reduction in Micromechanical Oscillators Arrays Coupled through Light
• Tunable frequency combs based on dual microring resonators
• A Robust and Tunable Add-Drop Filter Using Whispering Gallery Mode Microtoroid Resonator
• Master-Slave Locking of Optomechanical Oscillators Over A Long Distance
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Cited by in corpus (7)

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• Piezoelectric actuation for integrated photonics
• Free spectral range electrical tuning of a high quality on-chip microcavity
• Enhanced sensing of optomechanically induced nonlinearity by linewidth suppression and optical bistability in cavity-waveguide systems
• Fully reconfigurable optomechanical add-drop filters
• Intra-cavity field dynamics near avoided mode crossing in concentric silicon nitride ring resonator
• Opto-thermal dynamics in whispering-gallery microresonators