Improved optomechanical disk resonator sitting on a pedestal mechanical shield

Abstract

We experimentally demonstrate the controlled enhancement of the mechanical quality factor Q of GaAs disk optomechanical resonators. Disks vibrating at 1.3 GHz with a mechanical shield integrated in their pedestal show a Q improvement by a factor 10 to 16. The structure is modeled numerically and different modes of vibration are observed, which shed light on the Q enhancement mechanism. An optimized double-disk geometry is presented that promises Q above the million for a large parameter range.

arXiv comment6 pages, 5 figures

References in corpus (8)

• Cavity Optomechanics
• High frequency GaAs nano-optomechanical disk resonator
• Minimization of phonon-tunneling dissipation in mechanical resonators
• Photoelastic coupling in gallium arsenide optomechanical disk resonators
• Wavelength-sized GaAs optomechanical resonators with GHz frequency
• Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap
• Critical optical coupling between a GaAs disk and a nanowaveguide suspended on the chip
• Ultrahigh Q-Frequency product for optomechanical disk resonators with a mechanical shield

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• Microscopic nanomechanical dissipation in gallium arsenide resonators
• Optomechanical properties of GaAs/AlAs micropillar resonators operating in the 18 GHz range
• Processing light with an optically tunable mechanical memory
• Optomechanical THz detection with a sub-wavelength resonator