Damping of Nanomechanical Resonators

Abstract

We study the transverse oscillatory modes of nanomechanical silicon nitride strings under high tensile stress as a function of geometry and mode index m <= 9. Reproducing all observed resonance frequencies with classical elastic theory we extract the relevant elastic constants. Based on the oscillatory local strain we successfully predict the observed mode-dependent damping with a single frequency independent fit parameter. Our model clarifies the role of tensile stress on damping and hints at the underlying microscopic mechanisms.

References in corpus (8)

• Thermoelastic Damping in Micro- and Nano-Mechanical Systems
• An Atomic-resolution nanomechanical mass sensor
• A picogram and nanometer scale photonic crystal opto-mechanical cavity
• Preparation and Detection of a Mechanical Resonator Near the Ground State of Motion
• Nanomechanical motion measured with precision beyond the standard quantum limit
• Carbon nanotubes as ultra-high quality factor mechanical resonators
• Noise-enabled precision measurements of a Duffing nanomechanical resonator
• Intrinsic dissipation in nanomechanical resonators due to phonon tunneling

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