Strongly coupled modes in a weakly driven micromechanical resonator

Abstract

We demonstrate strong coupling between the flexural vibration modes of a clamped-clamped micromechanical resonator vibrating at low amplitudes. This coupling enables the direct measurement of the frequency response via amplitude- and phase modulation schemes using the fundamental mode as a mechanical detector. In the linear regime, a frequency shift of $0.8\mathrm{Hz}$ is observed for a mode with a line width of $5.8\mathrm{Hz}$ in vacuum. The measured response is well-described by the analytical model based on the Euler-Bernoulli beam including tension. Calculations predict an upper limit for the room-temperature Q-factor of $4.5\times 10^5$ for our top-down fabricated micromechanical beam resonators.

9 pages, 2 figures

References in corpus (11)

• Damping of Nanomechanical Resonators
• Nonlinear modal interactions in clamped-clamped mechanical resonators
• Strong coupling between mechanical modes in a nanotube resonator
• Non-adiabatic dynamics of two strongly coupled nanomechanical resonator modes
• Q-factor control of a microcantilever by mechanical sideband excitation
• Entropic Spectral Broadening in Carbon Nanotube Resonators
• Mechanical stiffening, bistability, and bit operations in a microcantilever
• Strong and tunable mode coupling in carbon nanotube resonators
• Interactions between directly and parametrically driven vibration modes in a micromechanical resonator
• Modal interactions of flexural and torsional vibrations in a microcantilever
• Magnetomotive drive and detection of clamped-clamped mechanical resonators in water

Cited by in corpus (9)

• Frequency fluctuations in silicon nanoresonators
• Mesoscopic physics of nanomechanical systems
• Frequency tuning, nonlinearities and mode coupling in circular graphene resonators
• Observation of decoherence in a carbon nanotube mechanical resonator
• Time-domain response of atomically thin $\mathrm{Mo}{\mathrm{S}}_2$ nanomechanical resonators
• Spectral effects of dispersive mode coupling in driven mesoscopic systems
• Nonlinear Dynamical System Model for Drive Mode Amplitude Instabilities in MEMS Gyroscopes
• Suppressing Frequency Fluctuations of Self-Sustained Vibrations in Underdamped Nonlinear Resonators
• Modal "self-coupling" as a sensitive probe for nanomechanical detection