Strongly coupled modes in a weakly driven micromechanical resonator

Abstract

We demonstrate strong coupling between the flexural vibration modes of a clamped-clamped micromechanical resonator vibrating at low amplitudes. This coupling enables the direct measurement of the frequency response via amplitude- and phase modulation schemes using the fundamental mode as a mechanical detector. In the linear regime, a frequency shift of $0.8\mathrm{Hz}$ is observed for a mode with a line width of $5.8\mathrm{Hz}$ in vacuum. The measured response is well-described by the analytical model based on the Euler-Bernoulli beam including tension. Calculations predict an upper limit for the room-temperature Q-factor of $4.5\times 10^5$ for our top-down fabricated micromechanical beam resonators.

9 pages, 2 figures

References in corpus (4)

• Nonlinear modal interactions in clamped-clamped mechanical resonators
• Mechanical stiffening, bistability, and bit operations in a microcantilever
• Strong and tunable mode coupling in carbon nanotube resonators
• Modal interactions of flexural and torsional vibrations in a microcantilever