Nanoelectromechanical Sensors based on Suspended 2D Materials
arXiv:2007.11920 · doi:10.34133/2020/8748602
Abstract
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
Review paper
References in corpus (31)
- Electric Field Effect in Atomically Thin Carbon Films
- Universal Dynamic Conductivity and Quantized Visible Opacity of Suspended Graphene
- Ultrahigh electron mobility in suspended graphene
- Detection of Individual Gas Molecules Absorbed on Graphene
- 2D materials and van der Waals heterostructures
- Boron nitride substrates for high-quality graphene electronics
- Giant Intrinsic Carrier Mobilities in Graphene and Its Bilayer
- Suspended Graphene: a bridge to the Dirac point
- Micrometer-scale ballistic transport in encapsulated graphene at room temperature
- Temperature dependent transport in suspended graphene
- A Mechanical Mass Sensor with Yoctogram Resolution
- Intrinsic Response of Graphene Vapor Sensors
- Mechanical Properties of Atomically Thin Boron Nitride and the Role of Interlayer Interactions
- Elastic Properties of Chemical-Vapor-Deposited Monolayer MoS2, WS2, and Their Bilayer Heterostructures
- Current-induced cleaning of graphene
- Limits on electron quality in suspended graphene due to flexural phonons
- Graphene mechanical oscillators with tunable frequency
- Integrating Graphene into Semiconductor Fabrication Lines
- Mechanics of freely-suspended ultrathin layered materials
- Ultra-sensitive Hall sensors based on graphene encapsulated in hexagonal boron nitride
- Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
- High quality-factor mechanical resonators based on WSe2 monolayers
- Revisiting the buckling metrology method to determine the Young's modulus of 2D materials
- Large yield production of high mobility freely suspended graphene electronic devices on a PMGI based organic polymer
- Flexible Hall Sensors Based on Graphene
- Hidden area and mechanical nonlinearities in freestanding graphene
- SU-8 clamped CVD graphene drum resonators
- Colorimetry technique for scalable characterization of suspended graphene
- Non-invasive Scanning Raman Spectroscopy and Tomography for Graphene Membrane Characterization
- Graphene resonator as an ultrasound detector for generalized Love waves in a polymer film with two level states
- PtSe2 grown directly on polymer foil for use as a robust piezoresistive sensor