SU-8 clamped CVD graphene drum resonators
arXiv:1612.04279 · doi:10.1063/1.4793302
Abstract
Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition (CVD) graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, this resonator is highly strained, indicating its potential in strain engineering for performance enhancement.
arXiv comment15 pages, 5 figures
References in corpus (10)
- Electric Field Effect in Atomically Thin Carbon Films
- Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils
- Ultrahigh electron mobility in suspended graphene
- Impermeable Atomic Membranes from Graphene Sheets
- Performance of Monolayer Graphene Nanomechanical Resonators with Electrical Readout
- Imaging mechanical vibrations in suspended graphene sheets
- Probing thermal expansion of graphene and modal dispersion at low-temperature using graphene NEMS resonators
- Stamp transferred suspended graphene mechanical resonators for radio-frequency electrical readout
- Radio frequency electrical transduction of graphene mechanical resonators
- Tuning mechanical modes and influence of charge screening in nanowire resonators
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