SU-8 clamped CVD graphene drum resonators

Abstract

Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition (CVD) graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, this resonator is highly strained, indicating its potential in strain engineering for performance enhancement.

15 pages, 5 figures

References in corpus (4)

• Electric Field Effect in Atomically Thin Carbon Films
• Ultrahigh electron mobility in suspended graphene
• Probing thermal expansion of graphene and modal dispersion at low-temperature using graphene NEMS resonators
• Stamp transferred suspended graphene mechanical resonators for radio-frequency electrical readout

Cited by in corpus (8)

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• Coupling graphene mechanical resonators to superconducting microwave cavities
• Nanomechanical Resonators: Toward Atomic Scale
• Mechanics of freely-suspended ultrathin layered materials
• Nanoelectromechanical Sensors based on Suspended 2D Materials
• Graphene optomechanics realized at microwave frequencies
• Interferometric Motion Detection in Atomic Layer 2D Nanostructures: Visualizing Signal Transduction Efficiency and Optimization Pathways
• Graphene nanoelectromechanical resonators for detection of modulated terahertz radiation