Chip-scale nanofabrication of single spins and spin arrays in diamond
arXiv:1007.0240 · doi:10.1021/nl102066q
Abstract
We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100 nm length scales. Secondary ion mass spectroscopy (SIMS) measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.
This paper has been withdrawn by the authors. 14 pages, 3 figures; Posting has been removed due to editorial request from ACS Nano Letters; This version has been removed by arXiv admin because it contains an inappropriate withdrawal notice
References in corpus (6)
- Scalable quantum register based on coupled electron spins in a room temperature solid
- Fabrication and Characterization of Two-Dimensional Photonic Crystal Microcavities in Nanocrystalline Diamond
- Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing
- Deterministic Ultracold Ion Source targeting the Heisenberg Limit
- Deterministically entangling distant nitrogen-vacancy centers by a nanomechanical cantilever
- Single-atom doping for quantum device development in diamond and silicon
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