Chip-scale nanofabrication of single spins and spin arrays in diamond
arXiv:1007.0240 · doi:10.1021/nl102066q
Abstract
We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100 nm length scales. Secondary ion mass spectroscopy (SIMS) measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.
arXiv commentThis paper has been withdrawn by the authors. 14 pages, 3 figures; Posting has been removed due to editorial request from ACS Nano Letters; This version has been removed by arXiv admin because it contains an inappropriate withdrawal notice
References in corpus (16)
- The nitrogen-vacancy center in diamond re-visited
- Room temperature coherent control of coupled single spins in solid
- Scalable quantum register based on coupled electron spins in a room temperature solid
- A quantum spin transducer based on nano electro-mechancial resonator arrays
- Anisotropic interactions of a single spin and dark-spin spectroscopy in diamond
- Generation of single colour centers by focussed nitrogen implantation
- Conversion of neutral nitrogen-vacancy centers to negatively-charged nitrogen-vacancy centers through selective oxidation
- Implantation of labelled single nitrogen vacancy centers in diamond using 15N
- Fabrication and Characterization of Two-Dimensional Photonic Crystal Microcavities in Nanocrystalline Diamond
- Chip-based microcavities coupled to NV centers in single crystal diamond
- Photochromism in single nitrogen-vacancy defect in diamond
- Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing
- A superconducting cavity bus for single Nitrogen Vacancy defect centres in diamond
- Deterministic Ultracold Ion Source targeting the Heisenberg Limit
- Deterministically entangling distant nitrogen-vacancy centers by a nanomechanical cantilever
- Single-atom doping for quantum device development in diamond and silicon
Cited by in corpus (125)
- The nitrogen-vacancy colour centre in diamond
- Sensing electric fields using single diamond spins
- Room temperature entanglement between distant single spins in diamond
- Resonant enhancement of the zero-phonon emission from a color center in a diamond cavity
- Polytype control of spin qubits in silicon carbide
- Laser writing of coherent colour centres in diamond
- High fidelity spin entanglement using optimal control
- Engineering shallow spins in diamond with nitrogen delta-doping
- Electrical and optical control of single spins integrated in scalable semiconductor devices
- Many-body Localization with Dipoles
- Observation of an environmentally insensitive solid state spin defect in diamond
- Probing spin-phonon interactions in silicon carbide with Gaussian acoustics
- Three megahertz photon collection rate from an NV center with millisecond spin coherence
- Scalable Focused Ion Beam Creation of Nearly Lifetime-Limited Single Quantum Emitters in Diamond Nanostructures
- Probing surface noise with depth-calibrated spins in diamond
- On the surface paramagnetism of diamond
- Spin Properties of Very Shallow Nitrogen Vacancy Defects in Diamond
- An integrated nanophotonic quantum register based on silicon-vacancy spins in diamond
- Dark states of single NV centers in diamond unraveled by single shot NMR
- Extending spin coherence times of diamond qubits by high temperature annealing
- Identifying and mitigating charge instabilities in shallow diamond nitrogen-vacancy centers
- Nanoscale nuclear magnetic resonance with a 1.9-nm-deep nitrogen-vacancy sensor
- Laser writing of individual atomic defects in a crystal with near-unity yield
- NMR Technique for Determining the Depth of Shallow Nitrogen-Vacancy Centers in Diamond
- Cavity quantum electrodynamics with color centers in diamond
- All-optical control of a solid-state spin using coherent dark states
- Tailoring spin defects in diamond
- Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique
- Optical coherence of diamond nitrogen-vacancy centers formed by ion implantation and annealing
- Single-molecule Scale Magnetic Resonance Spectroscopy using Nitrogen-Vacancy Centers in Diamond
- Increasing the coherence time of single electron spins in diamond by high temperature annealing
- Electron-Mediated Nuclear-Spin Interactions Between Distant NV Centers
- Spin properties of dense near-surface ensembles of nitrogen-vacancy centres in diamond
- Spatial mapping of band bending in semiconductor devices using in-situ quantum sensors
- Optical manipulation of Berry phase in a solid-state spin qubit
- A Quantum Photonic Interface for Tin-Vacancy Centers in Diamond
- High-efficiency generation of nanoscale single silicon vacancy defect array in silicon carbide
- Opportunities for long-range magnon-mediated entanglement of spin qubits via on- and off-resonant coupling
- Diamond surface engineering for molecular sensing with nitrogen-vacancy centers
- Topologically Protected Quantum State Transfer in a Chiral Spin Liquid
- Quantum interference of electromechanically stabilized emitters in nanophotonic devices
- Engineered arrays of NV color centers in diamond based on implantation of CN- molecules through nanoapertures
- Scalable single-photon sources in atomically thin MoS2
- Materials challenges for quantum technologies based on color centers in diamond
- A silicon-based surface code quantum computer
- Diamond Integrated Quantum Photonics: A Review
- Efficient extraction of zero-phonon-line photons from single nitrogen-vacancy centers in an integrated GaP-on-diamond platform
- Single Color Centers Implanted in Diamond Nanostructures
- Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters
- Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology
- Nanoimplantation and Purcell enhancement of single NV centers in photonic crystal cavities in diamond
- Hybrid nanocavities for resonant enhancement of color center emission in diamond
- Three-dimensional localization of spins in diamond using 12C implantation
- Coherent state transfer via highly mixed quantum spin chains
- Harnessing the Quantum Behavior of Spins on Surfaces
- Integrated Single Photon Emitters
- Quantum micro-nano devices fabricated in diamond by femtosecond laser and ion irradiation
- Strongly Coupled Diamond Spin Qubits by Molecular Nitrogen Implantation
- Evidence of light guiding in ion-implanted diamond
- Chip-integrated plasmonic cavity-enhanced single nitrogen-vacancy center emission
- Effects of low energy electron irradiation on formation of nitrogen-vacancy centers in single-crystal diamond
- Cavity-coupled telecom atomic source in silicon
- Narrow optical linewidths in erbium implanted in TiO
- Generation of Ensembles of Individually Resolvable Nitrogen Vacancies Using Nanometer-Scale Apertures in Ultrahigh-Aspect Ratio Planar Implantation Masks
- Enhanced concentrations of nitrogen-vacancy centers in diamond through TEM irradiation
- Free induction decay of single spins in diamond
- Quantum Logic between Remote Quantum Registers
- Extending the Quantum Coherence of a Near-Surface Qubit by Coherently Driving the Paramagnetic Surface Environment
- Towards optimized surface -profiles of nitrogen-vacancy centers activated by helium irradiation in diamond
- Waveguide-integrated single-crystalline GaP resonators on diamond
- Frequency control of single quantum emitters in integrated photonic circuits
- Highly-tunable formation of nitrogen-vacancy centers via ion implantation
- Shallow NV centers augmented by exploiting n-type diamond
- Spatially - resolved study of the Meissner effect in superconductors using NV-centers-in-diamond optical magnetometry
- Phononic waveguide assisted steady state entanglement of SiV centers
- Engineering chromium related single photon emitters in single crystal diamond
- Simulation of topological phases with color center arrays in phononic crystals
- Arrays of open, independently tunable microcavities
- Spin Coherence During Optical Excitation of a Single NV Center in Diamond
- Alignment of the Diamond Nitrogen Vacancy Center by Strain Engineering
- Magnetic field imaging by hBN quantum sensor nanoarray
- Single Spin Optically Detected Magnetic Resonance with E-Band Microwave Resonators
- First principles study of charge diffusion between proximate solid state qubits and its implications on sensor applications
- Long-range quantum gates using dipolar crystals
- Efficient creation of dipolar coupled nitrogen-vacancy spin qubits in diamond
- Top-down fabrication of plasmonic nanostructures for deterministic coupling to single quantum emitters
- Spin Measurements of NV Centers Coupled to a Photonic Crystal Cavity
- Depth dependent decoherence caused by surface and external spins for NV centers in diamond
- Collectively Enhanced Interactions in Solid-state Spin Qubits
- Comparison of different methods of nitrogen-vacancy layer formation in diamond for widefield quantum microscopy
- Identification and control of electron-nuclear spin defects in diamond
- Local formation of nitrogen-vacancy centers in diamond by swift heavy ions
- Simulation of higher-order topological phases in 2D spin-phononic crystal networks
- Nitrogen-vacancy magnetometry of CrSBr by diamond membrane transfer
- Initialization and Readout of Spin Chains for Quantum Information Transport
- Probing thermal magnon current mediated by coherent magnon via nitrogen-vacancy centers in diamond
- Surface effects on nitrogen vacancy centers neutralization in diamond
- Nitrogen-vacancy centers created by N ion implantation through screening SiO layers on diamond
- Low-control and robust quantum refrigerator and applications with electronic spins in diamond
- Isotopic identification of engineered nitrogen-vacancy spin qubits in ultrapure diamond
- Direct formation of nitrogen-vacancy centers in nitrogen doped diamond along the trajectories of swift heavy ions
- Discrete time quantum walk with nitrogen-vacancy centers in diamond coupled to a superconducting flux qubit
- Towards Quantum Sensing of Chiral-Induced Spin Selectivity: Probing Donor-Bridge-Acceptor Molecules with NV Centers in Diamond
- Hybrid microwave-optical scanning probe for addressing solid-state spins in nanophotonic cavities
- Angular dependent micro-ESR characterization of a locally doped Gd3+:Al2O3 system
- Cooperative light scattering in any dimension
- Modeling of radiative emission from shallow color centers in single crystalline diamond
- Nanometer-scale Exchange Interactions Between Spin Centers in Diamond
- Qubit guidelines for solid-state spin defects
- Spin filtering and switching action in a diamond network with magnetic-nonmagnetic atomic distribution
- Electrical control of spin dynamics in finite one-dimensional systems
- Hybrid paramagnetic-ferromagnetic quantum computer design based on electron spin arrays and a ferromagnetic nanostripe
- Robust control of long distance entanglement in disordered spin chains
- Photoactivation of color centers induced by laser irradiation in ion-implanted diamond
- Ensemble-Based Quantum Token Protocol Benchmarked on IBM Quantum Processors
- Efficient Analysis of Photoluminescence Images for the Classification of Single-Photon Emitters
- Scalable, nanoscale positioning of highly coherent color centers in prefabricated diamond nanostructures
- Review Article: Quantum Nanophotonics in Diamond
- Determining the position of a single spin relative to a metallic nanowire
- A Concise Primer on Solid-State Quantum Emitters
- Quantum simulation of spin-1/2 XYZ model using solid-state spin centers
- Direct-write milling of diamond by a focused oxygen ion beam
- Photoconversion of shallow nitrogen-vacancy centers in flat and nanostructured diamond under high-power laser irradiation
- Nanodiamond arrays on glass for quantification and fluorescence characterisation
- Quantum router of silicon-vacancy centers via a diamond waveguide