Engineering shallow spins in diamond with nitrogen delta-doping

Abstract

We demonstrate nanometer-precision depth control of nitrogen-vacancy (NV) center creation near the surface of synthetic diamond using an in situ nitrogen delta-doping technique during plasma-enhanced chemical vapor deposition. Despite their proximity to the surface, doped NV centers with depths (d) ranging from 5 - 100 nm display long spin coherence times, T2 > 100 \mus at d = 5 nm and T2 > 600 \mus at d \geq 50 nm. The consistently long spin coherence observed in such shallow NV centers enables applications such as atomic-scale external spin sensing and hybrid quantum architectures.

14 pages, 4 figures, 11 pages of additional supplementary material

References in corpus (22)

• High-sensitivity diamond magnetometer with nanoscale resolution
• Sensing electric fields using single diamond spins
• Universal dynamical decoupling of a single solid-state spin from a spin bath
• A robust, scanning quantum system for nanoscale sensing and imaging
• High-fidelity projective readout of a solid-state spin quantum register
• Scanning magnetic field microscope with a diamond single-spin sensor
• Scalable quantum register based on coupled electron spins in a room temperature solid
• Decoherence-protected quantum gates for a hybrid solid-state spin register
• Anisotropic interactions of a single spin and dark-spin spectroscopy in diamond
• Chemical control of the charge state of nitrogen-vacancy centers in diamond
• Extending Quantum Coherence in Diamond
• Chip-scale nanofabrication of single spins and spin arrays in diamond
• Measurement and Control of Single Nitrogen-Vacancy Center Spins above 600 K
• Dynamical Decoupling of a single electron spin at room temperature
• Conversion of neutral nitrogen-vacancy centers to negatively-charged nitrogen-vacancy centers through selective oxidation
• Coherence of single spins coupled to a nuclear spin bath of varying density
• Implantation of labelled single nitrogen vacancy centers in diamond using 15N
• Spin Properties of Very Shallow Nitrogen Vacancy Defects in Diamond
• Electron spin decoherence of single Nitrogen-Vacancy defects in diamond
• Nuclear spin pair coherence in diamond for atomic scale magnetometry
• Quantum control of proximal spins using nanoscale magnetic resonance imaging
• Increasing the coherence time of single electron spins in diamond by high temperature annealing

Cited by in corpus (116)

• Magnetometry with nitrogen-vacancy defects in diamond
• Sensitivity Optimization for NV-Diamond Magnetometry
• Room temperature entanglement between distant single spins in diamond
• Fluorescence thermometry enhanced by the quantum coherence of single spins in diamond
• Dynamic strain-mediated coupling of a single diamond spin to a mechanical resonator
• Diamond Nanophotonics
• Laser writing of coherent colour centres in diamond
• Towards a large-scale quantum simulator on diamond surface at room temperature
• Sub-nanometer resolution in three-dimensional magnetic-resonance imaging of individual dark spins
• Sensing remote nuclear spins
• Electrical and optical control of single spins integrated in scalable semiconductor devices
• Spectroscopy of Surface-Induced Noise Using Shallow Spins in Diamond
• Probing surface noise with depth-calibrated spins in diamond
• On the surface paramagnetism of diamond
• Scalable Quantum Photonics with Single Color Centers in Silicon Carbide
• Fabrication of all diamond scanning probes for nanoscale magnetometry
• Nanoscale nuclear magnetic resonance with a 1.9-nm-deep nitrogen-vacancy sensor
• Proton magnetic resonance imaging with a nitrogen-vacancy spin sensor
• Absolute magnetometry based on quantum beats in diamond nitrogen-vacancy centers
• Topical Review: Spins and mechanics in diamond
• Cavity quantum electrodynamics with color centers in diamond
• Deterministic formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique
• Double-quantum spin-relaxation limits to coherence of near-surface nitrogen-vacancy centers
• Optical coherence of diamond nitrogen-vacancy centers formed by ion implantation and annealing
• Single-molecule Scale Magnetic Resonance Spectroscopy using Nitrogen-Vacancy Centers in Diamond
• CVD diamond single crystals with NV centres: a review of material synthesis and technology for quantum sensing applications
• Spin properties of dense near-surface ensembles of nitrogen-vacancy centres in diamond
• Spatial mapping of band bending in semiconductor devices using in-situ quantum sensors
• Optically coherent nitrogen-vacancy centers in μm-thin etched diamond membranes
• Microscopic diamond Solid-Immersion-Lenses fabricated around single defect ceneters by focussed ion beam milling
• Opportunities for long-range magnon-mediated entanglement of spin qubits via on- and off-resonant coupling
• Diamond surface engineering for molecular sensing with nitrogen-vacancy centers
• Radio-frequency magnetometry using a single electron spin
• Multipulse Double-Quantum Magnetometry With Near-Surface Nitrogen Vacancy Centers
• Imaging crystal stress in diamond using ensembles of nitrogen-vacancy centers
• Photonic nano-structures on (111) oriented diamond
• Protecting a diamond quantum memory by charge state control
• Hybrid sensors based on colour centres in diamond and piezoactive layers
• Scalable single-photon sources in atomically thin MoS2
• Detecting External Electron Spins Using Nitrogen-Vacancy Centers
• Probing many-body dynamics in a two dimensional dipolar spin ensemble
• Atomic-scale nuclear spin imaging using quantum-assisted sensors in diamond
• Diamond Integrated Quantum Photonics: A Review
• Deterministic coupling of delta-doped NV centers to a nanobeam photonic crystal cavity
• Diamond based single molecule magnetic resonance spectroscopy
• Tutorial: Magnetic resonance with nitrogen-vacancy centers in diamond---microwave engineering, materials science, and magnetometry
• Time-resolved magnetic sensing with electronic spins in diamond
• Effect of Low-Damage Inductively Coupled Plasma on Shallow NV Centers in Diamond
• Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology
• Three-dimensional localization of spins in diamond using 12C implantation
• Tunable and Transferable Diamond Membranes for Integrated Quantum Technologies
• Two-dimensional nanoscale imaging of gadolinium spins via scanning probe relaxometry with a single spin in diamond
• Nanoscale Sensing Using Point Defects in Single-Crystal Diamond: Recent Progress on Nitrogen Vacancy Center-Based Sensors
• Integrated Single Photon Emitters
• Perfectly Aligned Shallow Ensemble Nitrogen-Vacancy Centers in (111) Diamond
• Quantum micro-nano devices fabricated in diamond by femtosecond laser and ion irradiation
• A low-loss, broadband antenna for efficient photon collection from a coherent spin in diamond
• Microwave saturation spectroscopy of nitrogen-vacancy ensembles in diamond
• Charge State Dynamics and Optically Detected Electron Spin Resonance Contrast of Shallow Nitrogen-Vacancy Centers in Diamond
• Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF${}_6$ plasma treatment
• Novel color center platforms enabling fundamental scientific discovery
• Nanoscale Electric Field Imaging with an Ambient Scanning Quantum Sensor Microscope
• Bottom-up Engineering of Diamond Nanostructures
• Negative charge enhancement of near-surface nitrogen vacancy centers by multicolor excitation
• Spin-defect characteristics of single sulfur vacancies in monolayer ${\text{MoS}}_2$
• Spin-mechanics with levitating ferromagnetic particles
• Extending the Quantum Coherence of a Near-Surface Qubit by Coherently Driving the Paramagnetic Surface Environment
• Towards optimized surface $\delta$-profiles of nitrogen-vacancy centers activated by helium irradiation in diamond
• Waveguide-integrated single-crystalline GaP resonators on diamond
• Optimizing the formation of depth-confined nitrogen vacancy center spin ensembles in diamond for quantum sensing
• Effect of surface oxidation on electron spin coherence of single nitrogen-vacancy centers in nanodiamonds
• Neuronal growth on high-aspect-ratio diamond nanopillar arrays for biosensing applications
• Nuclear Spin Assisted Magnetic Field Angle Sensing
• Hyperfine-Enhanced Gyromagnetic Ratio of a Nuclear Spin in Diamond
• High-efficiency resonant amplification of weak magnetic fields for single spin magnetometry
• Construction and operation of a tabletop system for nanoscale magnetometry with single nitrogen-vacancy centers in diamond
• Angstrom-resolution magnetic resonance imaging of single molecules via wavefunction fingerprints of nuclear spins
• The Role of Electrolytes in the Relaxation of Near-Surface Spin Defects in Diamond
• Roadmap on Nanoscale Magnetic Resonance Imaging
• Efficient creation of dipolar coupled nitrogen-vacancy spin qubits in diamond
• Top-down fabrication of plasmonic nanostructures for deterministic coupling to single quantum emitters
• Comparison of different methods of nitrogen-vacancy layer formation in diamond for widefield quantum microscopy
• Depth dependent decoherence caused by surface and external spins for NV centers in diamond
• Two-dimensional spin systems in PECVD-grown diamond with tunable density and long coherence for enhanced quantum sensing and simulation
• Electric noise spectra of a near-surface nitrogen vacancy center diamond with a protective layer
• Coherent microwave, optical, and mechanical quantum control of spin qubits in diamond
• Proposal for room-temperature quantum repeaters with nitrogen-vacancy centers and optomechanics
• Atomic Layer Deposition Nucleation Dependence on Diamond Surface Termination
• Dopant-assisted stabilization of negatively charged single nitrogen-vacancy centers in phosphorus-doped diamond at low temperatures
• Nitrogen-vacancy centers created by N${}^{+}$ ion implantation through screening SiO${}_2$ layers on diamond
• Ground State Microwave-Stimulated Raman Transitions and Adiabatic Spin Transfer in the ${}^{15}$Nitrogen-Vacancy Center
• Engineering quantum-coherent defects: the role of substrate miscut in chemical vapor deposition diamond growth
• Surface roughness noise analysis and comprehensive noise effects on depth-dependent coherence time of NV centers in diamond
• Low-control and robust quantum refrigerator and applications with electronic spins in diamond
• Fabrication of (111)-Faced Single-Crystal Diamond Plates by Laser Nucleated Cleaving
• A solution to electric-field screening in diamond quantum electrometers
• Decoherence of Nitrogen Vacancy Centers in Diamond
• Spin coherence in strongly coupled spin baths in quasi-two-dimensional layers
• Broadband EPR Spectroscopy in Diverse Field Conditions Using Optically Detected Nitrogen-Vacancy Centers in Diamond
• Modeling of radiative emission from shallow color centers in single crystalline diamond
• Spin coherence and depths of single nitrogen-vacancy centers created by ion implantation into diamond via screening masks
• Nanometer-scale Exchange Interactions Between Spin Centers in Diamond
• Scalable nuclear-spin entanglement mediated by a mechanical oscillator
• Atomic-scale positioning of single spins via multiple nitrogen-vacancy centers
• Relaxation of a single defect spin by the low-frequency gyrotropic mode of a magnetic vortex
• Enhanced and tunable electric dipole-dipole interactions near a planar metal film
• Quantum spin probe of single charge dynamics
• Revealing Collective Emission in the Single-to-Bulk Transition of Quantum Emitters in Nanodiamond Agglomerates
• Image of dynamic local exchange interactions in the dc magnetoresistance of spin-polarized current through a dopant
• Quantum Sensing Enhancement through a Nuclear Spin Register in Nitrogen-Vacancy Centers in Diamond
• Generation of spin-polarized currents via cross-relaxation with dynamically pumped paramagnetic impurities
• Widefield quantum microscopy with nitrogen-vacancy centers in diamond: strengths, limitations, and prospects
• The role of exchange interaction in nitrogen vacancy centre-based magnetometry
• Scalable, nanoscale positioning of highly coherent color centers in prefabricated diamond nanostructures
• Efficient creation of shallow NV${}^{-}$ ensembles by high-angle ion implantation
• Creation of Depth-Confined, Shallow Nitrogen-Vacancy Centers in Diamond With Tunable Density