Spin coherence and depths of single nitrogen-vacancy centers created by ion implantation into diamond via screening masks
arXiv:2006.07763 · doi:10.1063/5.0012187
Abstract
We characterize single nitrogen-vacancy (NV) centers created by 10-keV N+ ion implantation into diamond via thin SiO layers working as screening masks. Despite the relatively high acceleration energy compared with standard ones (< 5 keV) used to create near-surface NV centers, the screening masks modify the distribution of N ions to be peaked at the diamond surface [Ito et al., Appl. Phys. Lett. 110, 213105 (2017)]. We examine the relation between coherence times of the NV electronic spins and their depths, demonstrating that a large portion of NV centers are located within 10 nm from the surface, consistent with Monte Carlo simulations. The effect of the surface on the NV spin coherence time is evaluated through noise spectroscopy, surface topography, and X-ray photoelectron spectroscopy.
arXiv comment10 pages, 8 figures. To appear in Journal of Applied Physics (Special Topics on Materials for Quantum Technologies: Computing, Information, and Sensing)
References in corpus (27)
- Quantum Plasmonics
- Engineering shallow spins in diamond with nitrogen delta-doping
- Nanoscale NMR Spectroscopy and Imaging of Multiple Nuclear Species
- Spectroscopy of Surface-Induced Noise Using Shallow Spins in Diamond
- Conversion of neutral nitrogen-vacancy centers to negatively-charged nitrogen-vacancy centers through selective oxidation
- Probing surface noise with depth-calibrated spins in diamond
- Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy
- On the surface paramagnetism of diamond
- Spin Properties of Very Shallow Nitrogen Vacancy Defects in Diamond
- Extending spin coherence times of diamond qubits by high temperature annealing
- Nanoscale nuclear magnetic resonance with a 1.9-nm-deep nitrogen-vacancy sensor
- Broadband, large-area microwave antenna for optically-detected magnetic resonance of nitrogen-vacancy centers in diamond
- NMR Technique for Determining the Depth of Shallow Nitrogen-Vacancy Centers in Diamond
- Tailoring spin defects in diamond
- Double-quantum spin-relaxation limits to coherence of near-surface nitrogen-vacancy centers
- Scanning probe microscopy with chemical contrast by nanoscale nuclear magnetic resonance
- Spurious harmonic response of multipulse quantum sensing sequences
- Tutorial: Magnetic resonance with nitrogen-vacancy centers in diamond---microwave engineering, materials science, and magnetometry
- Effect of Low-Damage Inductively Coupled Plasma on Shallow NV Centers in Diamond
- Extending the Quantum Coherence of a Near-Surface Qubit by Coherently Driving the Paramagnetic Surface Environment
- Statistical investigations on nitrogen-vacancy center creation
- Construction and operation of a tabletop system for nanoscale magnetometry with single nitrogen-vacancy centers in diamond
- Depth dependent decoherence caused by surface and external spins for NV centers in diamond
- Determination of the Position of a Single Nuclear Spin from Free Nuclear Precessions Detected by a Solid-State Quantum Sensor
- Fast relaxation on qutrit transitions of nitrogen-vacancy centers in nanodiamonds
- Magnetic field sensitivity and decoherence spectroscopy of an ensemble of narrow-linewidth nitrogen-vacancy centers close to a diamond surface
- Nitrogen-vacancy centers created by N ion implantation through screening SiO layers on diamond