Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF${}_6$ plasma treatment

Abstract

Here we report the fabrication of stable, shallow (< 5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition (CVD) growth process. The NVs are stabilized after treating the diamond in $S{F}_6$ plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-Ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, and suggests very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm

arXiv commentThis is the version submitted to APL. The published version has some minor changes

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• Diamond surface engineering for molecular sensing with nitrogen-vacancy centers
• Diamond Integrated Quantum Photonics: A Review
• Nanoscale Sensing Using Point Defects in Single-Crystal Diamond: Recent Progress on Nitrogen Vacancy Center-Based Sensors
• Perfectly Aligned Shallow Ensemble Nitrogen-Vacancy Centers in (111) Diamond
• Hidden Silicon-Vacancy Centers in Diamond
• Randomisation of Pulse Phases for Unambiguous and Robust Quantum Sensing
• Protecting Quantum Information via Destructive Interference of Correlated Noise
• Robust Noise Suppression and Quantum Sensing by Continuous Phased Dynamical Decoupling
• Overcoming frequency resolution limits using a solid-state spin quantum sensor
• Creation of Depth-Confined, Shallow Nitrogen-Vacancy Centers in Diamond With Tunable Density