Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF${}_6$ plasma treatment

Abstract

Here we report the fabrication of stable, shallow (< 5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta doping at the last stage of the chemical vapor deposition (CVD) growth process. The NVs are stabilized after treating the diamond in $S{F}_6$ plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-Ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, and suggests very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm

This is the version submitted to APL. The published version has some minor changes

References in corpus (4)

• Unconditional quantum teleportation between distant solid-state qubits
• Engineering shallow spins in diamond with nitrogen delta-doping
• Coherence of single spins coupled to a nuclear spin bath of varying density
• Localized chemical switching of the charge state of nitrogen-vacancy luminescence centers in diamond

Cited by in corpus (3)

• Diamond surface engineering for molecular sensing with nitrogen-vacancy centers
• Nanoscale Sensing Using Point Defects in Single-Crystal Diamond: Recent Progress on Nitrogen Vacancy Center-Based Sensors
• Randomisation of Pulse Phases for Unambiguous and Robust Quantum Sensing