Spectral stability of V2 centres in sub-micron 4H-SiC membranes

Abstract

Colour centres in silicon carbide emerge as a promising semiconductor quantum technology platform with excellent spin-optical coherences.However, recent efforts towards maximising the photonic efficiency via integration into nanophotonic structures proved to be challenging due to reduced spectral stabilities. Here, we provide a large-scale systematic investigation on silicon vacancy centres in thin silicon carbide membranes with thicknesses down to $0.25\mu \mathrm{m}$. Our membrane fabrication process involves a combination of chemical mechanical polishing, reactive ion etching, and subsequent annealing. This leads to highly reproducible membranes with roughness values of $3-4\mathring{\mathrm{A}}$, as well as negligible surface fluorescence. We find that silicon vacancy centres show close-to lifetime limited optical linewidths with almost no signs of spectral wandering down to membrane thicknesses of $0.7\mu \mathrm{m}$. For silicon vacancy centres in thinner membranes down to $0.25\mu \mathrm{m}$, we observe spectral wandering, however, optical linewidths remain below $200\mathrm{MHz}$, which is compatible with spin-selective excitation schemes. Our work clearly shows that silicon vacancy centres can be integrated into sub-micron silicon carbide membranes, which opens the avenue towards obtaining the necessary improvements in photon extraction efficiency based on nanophotonic structuring.

10 pages, 4 figures, plus supplementary information

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• Cavity enhancement of V2 centers in 4H-SiC with a fiber-based Fabry-Pérot microcavity
• Quantum enhanced electric field mapping within semiconductor devices
• Laser-induced spectral diffusion and excited-state mixing of silicon T centres
• Fluorescence enhancement of single V2 centers in a 4H-SiC cavity antenna
• Check-probe spectroscopy of lifetime-limited emitters in bulk-grown silicon carbide
• Scalable registration of single quantum emitters within solid immersion lenses through femtosecond laser writing
• A Low-Temperature Tunable Microcavity featuring High Passive Stability and Microwave Integration
• Impact of Surface Treatment on Noise in PL-Measurements of Silicon Vacancies in 4H-SiC Lateral pin-Diodes