Multi-kV class $\beta$-Ga${}_2$O${}_3$ MESFETs with a Lateral Figure of Merit up to 355 MW/cm${}^2$

Arkka Bhattacharyya, Praneeth Ranga, Saurav Roy +5

We demonstrate over 3 kV gate-pad-connected field plated (GPFP) $\beta$-Ga${}_2$O${}_3$ lateral MESFETs with high lateral figure of merit (LFOM) using metalorganic vapor phase epitaxy (MOV…