A. Bhuiyan

collaborators

2 papers

cond-mat.mtrl-sci2025

Single-crystalline high-quality beta-Ga2O3 pseudo-substrate on sapphire through sputtering for epitaxial deposition

Guangying Wang, Shuwen Xie, William Brand +10

Solid-phase epitaxy (SPE) of beta-Ga2O3 thin films by radio-frequency (RF) sputtering and then crystallized through high-temperature post-deposition annealing is employed on sapphi…

physics.app-ph2025

LPCVD based Plasma Damage Free in situ etching of $β$ -Ga $_{2}$ O $_{3}$ using Solid Source Gallium

Saleh Ahmed Khan, Ahmed Ibreljic, A F M Anhar Uddin Bhuiyan

This work demonstrates a novel in situ etching technique for $β$ -Ga $_{2}$ O $_{3}$ using solid-source metallic Ga in a LPCVD system, enabling clean, anisotropic, plasma damage-free etchi…

Single-crystalline high-quality beta-Ga2O3 pseudo-substrate on sapphire through sputtering for epitaxial deposition

LPCVD based Plasma Damage Free in situ etching of β-Ga2​O3​ using Solid Source Gallium

LPCVD based Plasma Damage Free in situ etching of $β$ -Ga $_{2}$ O $_{3}$ using Solid Source Gallium