24 citations · 33 across the 10 of their papers we have counts for
3 papers · 1 filter
Single-crystalline high-quality beta-Ga2O3 pseudo-substrate on sapphire through sputtering for epitaxial deposition
Guangying Wang, Shuwen Xie, William Brand +10
Solid-phase epitaxy (SPE) of beta-Ga2O3 thin films by radio-frequency (RF) sputtering and then crystallized through high-temperature post-deposition annealing is employed on sapphi…
High-Purity Diamond Integration on -GaO via Microwave Plasma CVD for Enhanced Thermal Management
Saleh Ahmed Khan, Stephen Margiotta, Ahmed Ibreljic +1
The integration of diamond with -GaO presents a promising pathway to enhance thermal management in high-power electronic devices, where the inherently low thermal conduc…
LPCVD based Plasma Damage Free in situ etching of -GaO using Solid Source Gallium
Saleh Ahmed Khan, Ahmed Ibreljic, A F M Anhar Uddin Bhuiyan
This work demonstrates a novel in situ etching technique for -GaO using solid-source metallic Ga in a LPCVD system, enabling clean, anisotropic, plasma damage-free etchi…