6 papers
Single-crystalline high-quality beta-Ga2O3 pseudo-substrate on sapphire through sputtering for epitaxial deposition
Guangying Wang, Shuwen Xie, William Brand +10
Solid-phase epitaxy (SPE) of beta-Ga2O3 thin films by radio-frequency (RF) sputtering and then crystallized through high-temperature post-deposition annealing is employed on sapphi…
Neutron-Assisted Breakdown Enhancement in -GaO Schottky Diodes
Saleh Ahmed Khan, Sudipto Saha, Ahmed Ibreljic +6
This study demonstrates a substantial enhancement of breakdown voltage in -GaO Schottky diodes through an approach that combines fast neutron irradiation with controlled…
Quasi-Vertical -GaO Schottky Diodes on Sapphire Using All-LPCVD Growth and Plasma-Free Ga-Assisted Etching
Saleh Ahmed Khan, Ahmed Ibreljic, A F M Anhar Uddin Bhuiyan
This work demonstrates quasi-vertical beta-Ga2O3 Schottky barrier diodes (SBDs) fabricated on c-plane sapphire using an all-LPCVD, plasma-free process integrating epitaxial growth…
LPCVD based Plasma Damage Free in situ etching of -GaO using Solid Source Gallium
Saleh Ahmed Khan, Ahmed Ibreljic, A F M Anhar Uddin Bhuiyan
This work demonstrates a novel in situ etching technique for -GaO using solid-source metallic Ga in a LPCVD system, enabling clean, anisotropic, plasma damage-free etchi…
LPCVD Grown Si-Doped -GaO Films with Promising Electron Mobilities
Saleh Ahmed Khan, Ahmed Ibreljic, Stephen Margiotta +1
We systematically investigated the growth of Si-doped -GaO films using LPCVD system, achieving high electron mobilities of 162 cm/V.s and 149 cm/V.s at carrier c…
Thermal Annealing and Radiation Effects on Structural and Electrical Properties of NbN/GaN Superconductor/Semiconductor Junction
Stephen Margiotta, Binzhi Liu, Saleh Ahmed Khan +4
In the rapidly evolving field of quantum computing, niobium nitride (NbN) superconductors have emerged as integral components due to their unique structural properties, including a…