activity
20002026
most citedAdvanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

253 citations · 1.6k across the 38 of their papers we have counts for

collaborators

38 papers

cond-mat.supr-con2026

Elimination of Flux Trapping in Superconducting Circuits in Ambient Magnetic Fields

Rohan T. Kapur, Alex Wynn, Sergey K. Tolpygo +10

Superconductor digital electronics and quantum computing with superconducting qubits are promising next-generation computing technologies. When cooled down or operated in the prese…

cond-mat.supr-con2026

Mitigation of Magnetic Flux Trapping in Superconducting Electronics Using Moats

Rohan T. Kapur, Sergey K. Tolpygo, Alex Wynn +7

Magnetic flux (vortex) trapping remains a major obstacle to very large scale integration in superconducting electronics. Moats -- etched regions in circuit layers placed in ground…

cond-mat.supr-con2025★ 1 cited

Demonstration of Superconductor Shift Registers with Energy Dissipation Below Landauer's Thermodynamic Limit

Sergey K. Tolpygo, Evan B. Golden, Vasili K. Semenov

We study energy dissipation and propagation of information encoded by Josephson vortices in two types of circular shift register: a) a uniform register composed of sections of disc…

physics.gen-ph2025

Magnetic flux imaging in a 3D superconductor integrated circuit

Tong Ren, Andres Glatz, Boldizsar Jankó +3

We report on imaging magnetic flux distributions in a multilayered superconductor integrated circuit which emerge during magnetization and after field cooling of the circuit in the…

cond-mat.supr-con2025

Fabrication and Properties of NbN/NbNx/NbN and Nb/NbNx/Nb Josephson Junctions

Sergey K. Tolpygo, Ravi Rastogi, David Kim +3

Increasing integration scale of superconductor electronics (SCE) requires employing kinetic inductors and self-shunted Josephson junctions (JJs) for miniaturizing inductors and JJs…

cond-mat.supr-con2025★ 3 cited

Flux-trapping characterization for superconducting electronics using a cryogenic widefield N- diamond microscope

Rohan T. Kapur, Pauli Kehayias, Sergey K. Tolpygo +12

Magnetic flux trapping is a significant hurdle limiting the reliability and scalability of superconducting electronics, yet tools for imaging flux vortices remain slow or insensiti…

cond-mat.supr-con2024

Development of a Neuromorphic Network Using BioSFQ Circuits

Evan B. Golden, Vasili K. Semenov, Sergey K. Tolpygo

Superconductor electronics (SCE) appear promising for low energy applications. However, the achieved and projected circuit densities are insufficient for direct competition with CM…

cond-mat.supr-con2024

Extraction and Simulation of the Impact of Flux Trapping in Moats of AC-Biased Shift Registers

Scott E. Meninger, Sergey K. Tolpygo

Moats in superconducting ground planes are used to trap magnetic flux away from sensitive parts of superconductor integrated circuits. We simulate the effect of magnetic flux trapp…

cond-mat.supr-con2024

Characterization of Adiabatic Quantum-Flux-Parametrons in the MIT LL SFQ5ee+ Process

Sergey K. Tolpygo, Evan B. Golden, Christopher L. Ayala +4

Adiabatic quantum-flux-parametron (AQFP) logic is a proven energy-efficient superconductor technology for various applications. To address the scalability challenges, we investigat…

cond-mat.supr-con2023

Development of Self-Shunted Josephson Junctions For a Ten-Superconductor-Layer Fabrication Process: Nb/NbN/Nb Junctions

Sergey K. Tolpygo, Ravi Rastogi, Terence Weir +2

To increase integration scale of superconductor electronics, we are developing a new, SFQ7ee, node of the fabrication process at MIT Lincoln Laboratory. In comparison to the existi…

cond-mat.supr-con2023★ 27 cited

Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers

Sergey K. Tolpygo, Justin L. Mallek, Vladimir Bolkhovsky +5

To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of Josephson junctions (JJs) per chip, we developed a new fabricat…

cond-mat.supr-con2022★ 15 cited

BioSFQ circuit family for neuromorphic computing: Bridging digital and analog domains of superconductor technologies

Vasili K. Semenov, Evan B. Golden, Sergey K. Tolpygo

Superconductor single flux quantum (SFQ) technology is attractive for neuromorphic computing due to low energy dissipation and high, potentially up to 100 GHz, clock rates. We have…

cond-mat.supr-con2022★ 11 cited

Scalability of Superconductor Electronics: Limitations Imposed by AC Clock and Flux Bias Transformers

Sergey K. Tolpygo

Flux transformers are the necessary component of all superconductor digital integrated circuits utilizing ac power for logic cell excitation and clocking, and flux biasing, e.g., A…

cond-mat.supr-con2022★ 11 cited

Self- and Mutual Inductance of NbN and Bilayer NbN/Nb Inductors in Planarized Fabrication Process With Nb Ground Planes

Sergey K. Tolpygo, Evan B. Golden, Terence J. Weir +2

We present measurements of the self- and mutual inductance of NbN and bilayer NbN/Nb inductors with Nb ground plane(s) fabricated in an advanced process for superconductor electron…

cond-mat.supr-con2021★ 14 cited

Wafer-Scale Characterization of a Superconductor Integrated Circuit Fabrication Process, Using a Cryogenic Wafer Prober

Joshua T. West, Arthur Kurlej, Alex Wynn +3

Using a fully automated cryogenic wafer prober, we measured superconductor fabrication process control monitors and simple integrated circuits on 200 mm wafers at 4.4 K, including…

cond-mat.supr-con2021★ 24 cited

Mutual and self-inductance in planarized multilayered superconductor integrated circuits: Microstrips, striplines, bends, meanders, ground plane perforations

Sergey K. Tolpygo, Evan B. Golden, Terence J. Weir +1

Data are presented on mutual and self-inductance of various inductors used in multilayered superconductor integrated circuits: microstrips and striplines with widths of signal trac…

cond-mat.supr-con2021★ 26 cited

A new family of bioSFQ logic/memory cells

Vasili K. Semenov, Evan B. Golden, Sergey K. Tolpygo

Superconductor electronics (SCE) is competing to become a platform for efficient implementations of neuromorphic computing and deep learning algorithms (DLAs) with projects mostly…

cond-mat.supr-con2021★ 46 cited

Inductance and mutual inductance of superconductor integrated circuit features with sizes down to 120 nm. Part I

Sergey. K. Tolpygo, Evan B. Golden, Terence J. Weir +1

Data are presented on inductance of various features used in superconductor digital integrated circuits such as microstrip and stripline inductors with linewidths down to 120 nm an…

cond-mat.supr-con2020★ 14 cited

SFQ bias for SFQ digital circuits

Vasili K. Semenov, Evan B. Golden, Sergey K. Tolpygo

Superconductor electronics fabrication technology developed at MIT Lincoln Laboratory enables the development of VLSI digital circuits with millions of Josephson junctions per squa…

physics.app-ph2019★ 69 cited

Very Large Scale Integration of Josephson-Junction-Based Superconductor Random Access Memories

Vasili K. Semenov, Yuri A. Polyakov, Sergey K. Tolpygo

Arrays of Vortex Transitional (VT) memory cells with functional density up to have been designed, fabricated, and successfully demonstrated. This progress is due to r…

cond-mat.supr-con2019★ 29 cited

Planarized Fabrication Process With Two Layers of SIS Josephson Junctions and Integration of SIS and SFS π-Junctions

Sergey K. Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi +6

We present our new fabrication Process for Superconductor Electronics (PSE2) that integrates two (2) layers of Josephson junctions in a fully planarized multilayer process on 200-m…

cond-mat.supr-con2018★ 57 cited

Superconductor Electronics Fabrication Process with MoN Kinetic Inductors and Self-Shunted Josephson Junctions

Sergey K. Tolpygo, Vladimir Bolkhovsky, D. E. Oates +6

Recent progress in superconductor electronics fabrication has enabled single-flux-quantum (SFQ) digital circuits with close to one million Josephson junctions (JJs) on 1-cm chi…

cond-mat.supr-con2017★ 2 cited

Ring Oscillators for Clocking Reversible Superconducting Circuits and Fabrication Process Benchmarking

Vasili K. Semenov, Yuri A. Polyakov, Sergey K. Tolpygo

Existing concepts of reversible superconducting circuits as well as demonstrated adiabatic circuits require three-phase bias/clock signals generated by room temperature sources. A…

cond-mat.supr-con2017★ 15 cited

Developments Toward a 250-nm, Fully Planarized Fabrication Process With Ten Superconducting Layers And Self-Shunted Josephson Junctions

Sergey K. Tolpygo, Vladimir Bolkhovsky, Ravi Rastogi +5

We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junc…