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most citedAdvanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

253 citations · 1.6k across the 38 of their papers we have counts for

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cond-mat.supr-con2010★ 15 cited

Diffusion stop-layers for superconducting integrated circuits and qubits with Nb-based Josephson junctions

Sergey K. Tolpygo, Denis Amparo, Richard T. Hunt +2

New technology for superconductor integrated circuits has been developed and is presented. It employs diffusion stoplayers (DSLs) to protect Josephson junctions (JJs) from interlay…