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most citedAdvanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

253 citations · 1.6k across the 38 of their papers we have counts for

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cond-mat.supr-con2009★ 20 cited

Fabrication process-induced variations of Nb/Al/AlOx/Nb Josephson junctions in superconductor integrated circuits

Sergey K. Tolpygo, Denis Amparo

Currently, superconductor digital integrated circuits fabricated at HYPRES, Inc. can operate at clock frequencies of ~ 40 GHz. The circuits present multilayered structures containi…