253 citations · 1.6k across the 38 of their papers we have counts for
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New AC-Powered SFQ Digital Circuits
Vasili K. Semenov, Yuri A. Polyakov, Sergey K. Tolpygo
Recent progress of Reciprocal Quantum Logic (RQL) has renewed interest in AC powering of superconductor digital circuits, which had been abandoned since the famous IBM project of 1…
Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits
Sergey K. Tolpygo, Vladimir Bolkhovsky, Terence J. Weir +3
A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is…
Inductance of Circuit Structures for MIT LL Superconductor Electronics Fabrication Process with 8 Niobium Layers
Sergey K. Tolpygo, Vladimir Bolkhovsky, T. J. Weir +4
Inductance of superconducting thin-film inductors and structures with linewidth down to 250 nm has been experimentally evaluated. The inductors include various striplines and micro…