Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
arXiv:2003.07115 · doi:10.1038/s41928-019-0287-1
Abstract
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring-mass and piezoresistive transducers. The transducers, which are realized using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers.
42 pages, 4 figures
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Cited by in corpus (19)
- Nanomechanical Resonators: Toward Atomic Scale
- Nanoelectromechanical Sensors based on Suspended 2D Materials
- Dynamics of 2D Material Membranes
- Suspended graphene membranes with attached silicon proof masses as piezoresistive NEMS accelerometers
- Nanomechanical Dissipation and Strain Engineering
- Recent Advances in Graphene-Based Pressure Sensors: A Review
- Engineering the dissipation of crystalline micromechanical resonators
- Recent Advances in Graphene-Based Humidity Sensors with the Focus of Structural Design: A Review
- Dependable contact related parameter extraction in graphene-metal junctions
- High-yield large-scale suspended graphene membranes over closed cavities for sensor applications
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- Tunable coupling of two mechanical resonators by a graphene membrane
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