Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes
arXiv:1306.5876 · doi:10.1021/nl401352k
Abstract
Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical (NEMS) devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nano-electromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nano-electromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previously reported gauge factors and simulation values. The membrane in our experiment acts as a strain gauge independent of crystallographic orientation and allows for aggressive size scalability. When compared with conventional pressure sensors, the sensors have orders of magnitude higher sensitivity per unit area.
20 pages, 3 figures
References in corpus (5)
Cited by in corpus (45)
- Piezoresistivity and Strain-induced Band Gap Tuning in Atomically Thin MoS2
- Integrating MEMS and ICs
- Resistive Graphene Humidity Sensors with Rapid and Direct Electrical Readout
- Graphene Squeeze-Film Pressure Sensors
- Integrating Graphene into Semiconductor Fabrication Lines
- Highly sensitive electromechanical piezoresistive pressure sensors based on large-area layered PtSe films
- Nanoelectromechanical Sensors based on Suspended 2D Materials
- Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
- Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
- Inkjet Printed 2D-Crystal Based Strain Gauges on Paper
- Chemical vapor deposited graphene: From synthesis to applications
- Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications
- Dynamics of 2D Material Membranes
- Suspended graphene membranes with attached silicon proof masses as piezoresistive NEMS accelerometers
- The positive piezoconductive effect in graphene
- High-frequency stochastic switching of graphene resonators near room temperature
- Graphene multi-mode parametric oscillators
- Electromechanical Oscillations in Bilayer Graphene
- Recent Advances in Graphene-Based Pressure Sensors: A Review
- Kinks and antikinks of buckled graphene: A testing ground for phi^4 field model
- Dependable contact related parameter extraction in graphene-metal junctions
- All CVD Boron Nitride Encapsulated Graphene FETs with CMOS Compatible Metal Edge Contacts
- Colorimetry technique for scalable characterization of suspended graphene
- Graphene Gas Osmometers
- Non-invasive Scanning Raman Spectroscopy and Tomography for Graphene Membrane Characterization
- High-yield large-scale suspended graphene membranes over closed cavities for sensor applications
- Large Scale Integration of Graphene Transistors for Potential Applications in the Back End of the Line
- Probing the Shape of a Graphene Nanobubble
- Phosphorene as a nanoelectromechanical material
- Very large scale characterization of graphene mechanical devices using a colorimetry technique
- Self-sealing complex oxide resonators
- Squeeze-film effect on atomically thin resonators in the high-pressure limit
- Self-calibrating gas pressure sensor with a 10-decade measurement range
- Piezoresistive PtSe pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates
- The graphene squeeze-film microphone
- Single pixel wide gamut dynamic color modulation based on graphene micromechanical system
- Discontinuous evolution of the structure of stretching polycrystalline graphene
- Giant enhancement of Piezo-resistance in ballistic graphene due to transverse electric fields
- Proposal for a graphene based nano-electro-mechanical reference piezoresistor
- On-Chip Optical Transduction Scheme for Graphene Nano-Electro-Mechanical Systems in Silicon-Photonic Platform
- Electrically-tunable graphene nanomechanical resonators
- Ballistic graphene array for ultra-high pressure sensing
- Efficient structural relaxation of polycrystalline graphene models
- Strain Engineering of Correlated Charge-Ordered Phases in 1T-TaS2
- PtSe2 grown directly on polymer foil for use as a robust piezoresistive sensor