Suspended graphene membranes with attached silicon proof masses as piezoresistive NEMS accelerometers

Abstract

Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully-clamped at their circumference and that have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents and are able to suspend larger silicon proof masses, as compared to the previously graphene ribbon devices. These findings are an important step towards bringing ultra-miniaturized piezoresistive graphene NEMS closer towards deployment in emerging applications such as in wearable electronics, biomedical implants and internet of things (IoT) devices.

arXiv comment40 pages, 5 figures. arXiv admin note: text overlap with arXiv:2003.07115

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• High-yield large-scale suspended graphene membranes over closed cavities for sensor applications
• Four ribbons of double-layer graphene suspending masses for NEMS applications
• Squeeze-film effect on atomically thin resonators in the high-pressure limit
• Piezoresistive PtSe${}_2$ pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates
• The graphene squeeze-film microphone
• Electrically-tunable graphene nanomechanical resonators
• Electron-beam-induced Contactless Manipulation of Interlayer Twist in van der Waals Heterostructures