Very large scale characterization of graphene mechanical devices using a colorimetry technique

Abstract

We use a scalable optical technique to characterize more than 21000 circular nanomechanical devices made out of suspended single- and double-layer graphene on cavities with different diameters ($D$) and depths ($g$). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated to a structural mechanics scaling parameter given by $D^4/g^3$. Moreover, we extract a median adhesion energy of $\Gamma =$ 0.9 J/m${}^2$ between the membrane and the native SiO${}_2$ at the bottom of the cavities.

arXiv comment7 pages, 5 figures

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Cited by in corpus (5)

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• Optomechanics for thermal characterization of suspended graphene
• Graphene mechanical pixels for Interferometric MOdulator Displays (GIMOD)
• Amplitude calibration of 2D mechanical resonators by nonlinear optical transduction
• Single pixel wide gamut dynamic color modulation based on graphene micromechanical system