160 citations · 160 across the 1 of their papers we have counts for
4 papers
Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications
Xuge Fan, Anderson D. Smith, Fredrik Forsberg +8
Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes i…
Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
Xuge Fan, Fredrik Forsberg, Anderson D. Smith +7
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devic…
Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
Anderson D. Smith, Frank Niklaus, Alan Paussa +9
Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentall…
Integrating MEMS and ICs
Andreas C. Fischer, Fredrik Forsberg, Martin Lapisa +4
The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sens…