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physics.app-ph2020
Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications
Xuge Fan, Anderson D. Smith, Fredrik Forsberg +8
Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes i…
physics.app-ph2020
Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
Xuge Fan, Fredrik Forsberg, Anderson D. Smith +7
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devic…