139 citations
3 papers
physics.app-ph2020★ 89 cited
Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications
Xuge Fan, Anderson D. Smith, Fredrik Forsberg +8
Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes i…
physics.app-ph2020★ 139 cited
Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
Xuge Fan, Fredrik Forsberg, Anderson D. Smith +7
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devic…
cs.OH2008
High Density Through Silicon Via (TSV)
Magnus Rimskog, Tomas Bauer
The Through Silicon Via (TSV) process developed by Silex provides down to 30 micrometers pitch for through wafer connections in up to 600 micrometers thick substrates. Integrated w…