Direct growth of low-doped graphene on Ge/Si(001) surfaces

Abstract

The practical difficulties to use graphene in microelectronics and optoelectronics is that the available methods to grow graphene are not easily integrated in the mainstream technologies. A growth method that could overcome at least some of these problems is chemical vapour deposition (CVD) of graphene directly on semiconducting (Si or Ge) substrates. Here we report on the comparison of the CVD and molecular beam epitaxy (MBE) growth of graphene on the technologically relevant Ge(001)/Si(001) substrate from ethene (C${}_2$H${}_4$) precursor and describe the physical properties of the films as well as we discuss the surface reaction and diffusion processes that may be responsible for the observed behavior. Using nano angle resolved photoemission (nanoARPES) complemented by transport studies and Raman spectroscopy, we report the direct observation of massless Dirac particles in monolayer graphene, providing a comprehensive mapping of their low-hole doped Dirac electron bands. The micrometric graphene flakes are oriented along two predominant directions rotated by $30^{\circ }$ with respect to each other. The growth mode is attributed to the mechanism when small graphene "molecules" nucleate on the Ge(001) surface and it is found that hydrogen plays a significant role in this process.

arXiv commenttext and 8 figures

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Cited by in corpus (8)

• Investigating the CVD synthesis of graphene on Ge(100): towards layer by layer growth
• Decoupling of graphene from Ni(111) via oxygen intercalation
• The graphene/n-Ge(110) interface: structure, doping, and electronic properties
• Epitaxial graphene/Ge interfaces: a minireview
• Growth and electronic structure of graphene on semiconducting Ge(110)
• Early stage of CVD graphene synthesis on Ge(001) substrate
• Driving with temperature the synthesis of graphene films on Ge(110)
• Abrupt changes in the graphene on Ge(001) system at the onset of surface melting