Silicon carbide for integrated photonics

Abstract

The recent progress in chip-scale integrated photonics has stimulated the rapid development of material platforms with desired optical properties. Among the different material platforms that are currently investigated, the third-generation semiconductor, silicon carbide (SiC), offers the broadest range of functionalities, including wide bandgap, high optical nonlinearities, high refractive index, and CMOS-compatible device fabrication process. Here, we provide an overview of SiC-based integrated photonics, presenting the latest progress on investigating its basic optical and optoelectronic properties, as well as the recent developments in the fabrication of several typical approaches for light confinement structures that form the basic building blocks for low-loss, high functional and industry-compatible integrated photonic platform. Moreover, recent works employing SiC as optically-readable spin hosts for quantum information applications are also summarized and discussed. As a still-developing integrated photonic platform, the prospects and challenges of SiC material platform in the field of integrated photonics are also discussed, followed by potential solutions.

arXiv comment47pages, 15 figures

References in corpus (57)

• Van der Waals heterostructures
• Cavity Optomechanics
• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Optomechanical Crystals
• Broadband electro-optic frequency comb generation in an integrated microring resonator
• Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator
• Solid-state electronic spin coherence time approaching one second
• Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity
• Coherent control of single spins in silicon carbide at room temperature
• Coherent Raman spectro-imaging with laser frequency combs
• Isolated electron spins in silicon carbide with millisecond-coherence times
• Optomechanical quantum information processing with photons and phonons
• Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides
• Coupling of Nitrogen-Vacancy Centers to Photonic Crystal Cavities in Monocrystalline Diamond
• Monolithic photonic circuits for Kerr frequency comb generation, filtering and modulation
• Controlling photonic structures using optical forces
• Ultra-efficient frequency comb generation in AlGaAs-on-insulator microresonators
• Nonlinear and Quantum Optics with Whispering Gallery Resonators
• Mode spectrum and temporal soliton formation in optical microresonators
• High-fidelity spin and optical control of single silicon vacancy centres in silicon carbide
• Naturally-phasematched second harmonic generation in a whispering gallery mode resonator
• Probing spin-phonon interactions in silicon carbide with Gaussian acoustics
• Engineering near infrared single photon emitters in ultrapure silicon carbide
• Controlling phonons and photons at the wavelength-scale: silicon photonics meets silicon phononics
• Nanofabricated and integrated colour centres in silicon carbide with high-coherence spin-optical properties
• Quantum optics of soliton microcombs
• High frequency GaAs nano-optomechanical disk resonator
• Coherent control of nitrogen-vacancy center spins in silicon carbide at room temperature
• Diamond optomechanical crystals
• Electromagnetically induced transparency and wide-band wavelength conversion in silicon nitride microdisk optomechanical resonators
• Purcell enhancement of a single silicon carbide color center with coherent spin control
• Optical parametric oscillation in silicon carbide nanophotonics
• Gallium Arsenide (GaAs) Quantum Photonic Waveguide Circuits
• Optomechanical sensing of spontaneous wave-function collapse
• Selective Purcell enhancement of two closely linked zero-phonon transitions of a silicon carbide color center
• Silicon Carbide Photonic Crystal Cavities with Integrated Color Centers
• Room temperature coherent manipulation of single-spin qubits in silicon carbide with a high readout contrast
• Broadband dispersion engineered microresonator on-a-chip
• Electron Spin Decoherence in Silicon Carbide Nuclear Spin Bath
• Photonic chip-based soliton frequency combs covering the biological imaging window
• Diamond Integrated Optomechanical Circuits
• Quantum Frequency Conversion of a Quantum Dot Single-Photon Source on a Nanophotonic Chip
• Downconversion quantum interface for a single quantum dot spin and 1550-nm single-photon channel
• First principles predictions of magneto-optical data for semiconductor defects: the case of divacancy defects in 4H-SiC
• Resonant optical spin initialization and readout of single silicon vacancies in 4H-SiC
• High Q SiC microresonators
• Identification and tunable optical coherent control of transition-metal spins in silicon carbide
• Photonic Crystal Cavities in Cubic (3C) Polytype Silicon Carbide Films
• Second-harmonic generation and linear electro-optical coefficients of SiC polytypes and nanotubes
• Cavity-enhanced measurements of defect spins in silicon carbide
• Four wave mixing in 3C SiC Ring Resonators
• Visible Photoluminescence from Cubic (3C) Silicon Carbide Microdisks Coupled to High Quality Whispering Gallery Modes
• Enhanced cavity coupling to silicon monovacancies in 4-H Silicon Carbide using below bandgap laser irradiation and low temperature thermal annealing
• Quantum photonics in triangular-cross-section nanodevices in silicon carbide
• Racetrack microresonator based electro-optic phase shifters on a 3C-silicon-carbide-on-insulator platform
• Dispersion engineering of high-Q silicon microresonators via thermal oxidation
• Visible and Near-infrared Microdisk Resonators on a 4H-Silicon-Carbide-on-Insulator Platform

Cited by in corpus (7)

• Investigation of the electro-optic effect in high-$Q$ 4H-SiC microresonators
• A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission
• Non-linear optics at twist interfaces in h-BN/SiC heterostructures
• Perspectives on epitaxial InGaP for quantum and nonlinear optics
• A Concise Primer on Solid-State Quantum Emitters
• Impact of Surface Treatment on Noise in PL-Measurements of Silicon Vacancies in 4H-SiC Lateral pin-Diodes
• Spin-photon Qubits for Scalable Quantum Network