Photonic Crystal Cavities in Cubic (3C) Polytype Silicon Carbide Films

Abstract

We present the design, fabrication, and characterization of high quality factor and small mode volume planar photonic crystal cavities from cubic (3C) thin films (thickness ~ 200 nm) of silicon carbide (SiC) grown epitaxially on a silicon substrate. We demonstrate cavity resonances across the telecommunications band, with wavelengths from 1,250 - 1,600 nm. Finally, we discuss possible applications in nonlinear optics, optical interconnects, and quantum information science.

7 pages, 6 figures

References in corpus (6)

• Photonic quantum technologies
• High Quality factor photonic crystal nanobeam cavities
• Integrated GaN photonic circuits on silicon (100) for second harmonic generation
• Second harmonic generation in phase matched aluminum nitride waveguides
• Gallium Phosphide Photonic Crystal Nanocavities in the Visible
• Second Harmonic Generation in Photonic Crystal Cavities in (111)-Oriented GaAs

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• Silicon Carbide Photonic Crystal Cavities with Integrated Color Centers
• Cavity-enhanced measurements of defect spins in silicon carbide
• Hybrid Group IV Nanophotonic Structures Incorporating Diamond Silicon-Vacancy Color Centers
• Novel color center platforms enabling fundamental scientific discovery
• Visible Photoluminescence from Cubic (3C) Silicon Carbide Microdisks Coupled to High Quality Whispering Gallery Modes
• Quantum Information Processing With Integrated Silicon Carbide Photonics
• Multimode nanobeam cavities for nonlinear optics: high quality resonances separated by an octave
• Quantum photonics in triangular-cross-section nanodevices in silicon carbide
• High-Q/V two-dimensional photonic crystals cavities in 3C-SiC
• Predictive coupled-cluster isomer orderings for some Si${}_n$C${}_m$ ($m,n\le 12$) clusters; A pragmatic comparison between DFT and complete basis limit coupled-cluster benchmarks