Photonic Crystal Cavities in Silicon Dioxide

Abstract

One dimensional nano-beam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 10^4 are found via simulation, while quality factors of over 5*10^3 are found in experiment, for cavities with mode volumes of 2.0 cubic wavelengths (in oxide) and in the visible wavelength range (600-716nm). The dependences of the cavity quality factor and mode volume for different design parameters are also considered.

4 pages, 3 figures

References in corpus (3)

• High Quality factor photonic crystal nanobeam cavities
• Genetic Optimization of Photonic Bandgap Structures
• Design of an ultrahigh Quality factor silicon nitride photonic crystal nanocavity for coupling to diamond nanocrystals

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