Fabrication of Triangular Nanobeam Waveguide Networks in Bulk diamond Using Single-Crystal Silicon Hard Masks
arXiv:1411.3639 · doi:10.1063/1.4902562
Abstract
A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q=2.51x10^6) photonic crystal cavities with low mode volume (Vm=1.062x(λ/n)^3), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q=3x103.
arXiv commentThis article will be published in Applied Physics Letters
References in corpus (16)
- The Quantum Internet
- Solid-state electronic spin coherence time approaching one second
- Unconditional quantum teleportation between distant solid-state qubits
- Room temperature entanglement between distant single spins in diamond
- Indistinguishable photons from separated silicon-vacancy centers in diamond
- Resonant enhancement of the zero-phonon emission from a color center in a diamond cavity
- Coupling of Nitrogen-Vacancy Centers to Photonic Crystal Cavities in Monocrystalline Diamond
- Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity
- Fault-tolerant quantum repeaters with minimal physical resources, and implementations based on single photon emitters
- High-Q optical nanocavities in bulk single-crystal diamond
- Enhancement of the Zero Phonon Line emission from a Single NV-Center in a Nanodiamond via Coupling to a Photonic Crystal Cavity
- Fabrication and Characterization of Two-Dimensional Photonic Crystal Microcavities in Nanocrystalline Diamond
- Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond
- Deterministic nano-assembly of a coupled quantum emitter - photonic crystal cavity system
- Photonic Crystal Cavities in Silicon Dioxide
- Triangular nanobeam photonic cavities in single crystal diamond
Cited by in corpus (17)
- Quantum networks based on color centers in diamond
- Coherent spin control of a nanocavity-enhanced qubit in diamond
- A fiber-coupled diamond quantum nanophotonic interface
- Strongly Cavity-Enhanced Spontaneous Emission from Silicon-Vacancy Centers in Diamond
- Rectangular Photonic Crystal Nanobeam Cavities in Bulk Diamond
- Superconducting single photon detectors integrated with diamond nanophotonic circuits
- Diamond Integrated Quantum Photonics: A Review
- Single crystal diamond nanobeam waveguide optomechanics
- Realizing > 300,000 in diamond microdisks for optomechanics via etch optimization
- Crystallographic Orientation Dependent Reactive Ion Etch in Single Crystal Diamond
- Diamond as a material for monolithically integrated optical and optomechanical devices
- Faraday cage angled-etching of nanostructures in bulk dielectrics
- 'Sawfish' Photonic Crystal Cavity for Near-Unity Emitter-to-Fiber Interfacing in Quantum Network Applications
- High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2
- Fabrication of Sawfish photonic crystal cavities in bulk diamond
- Waveguide-loaded silica fibers for coupling to high-index micro-resonators
- A Tunable Waveguide-Coupled Cavity Design for Efficient Spin-Photon Interfaces in Photonic Integrated Circuits