Rectangular Photonic Crystal Nanobeam Cavities in Bulk Diamond

Abstract

We demonstrate the fabrication of photonic crystal nanobeam cavities with rectangular cross section into bulk diamond. In simulation, these cavities have an unloaded quality factor (Q) of over 1 million. Measured cavity resonances show fundamental modes with spectrometer-limited quality factors larger than 14,000 within 1nm of the NV center's zero phonon line at 637nm. We find high cavity yield across the full diamond chip with deterministic resonance trends across the fabricated parameter sweeps.

References in corpus (8)

• Indistinguishable photons from separated silicon-vacancy centers in diamond
• Quantum Nonlinear Optics with a Germanium-Vacancy Color Center in a Nanoscale Diamond Waveguide
• High-Q optical nanocavities in bulk single-crystal diamond
• Coherent spin control of a nanocavity-enhanced qubit in diamond
• Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond
• Deterministic coupling of delta-doped NV centers to a nanobeam photonic crystal cavity
• Design and low-temperature characterization of a tunable microcavity for diamond-based quantum networks
• Fabrication of Triangular Nanobeam Waveguide Networks in Bulk diamond Using Single-Crystal Silicon Hard Masks

Cited by in corpus (39)

• Large-scale integration of near-indistinguishable artificial atoms in hybrid photonic circuits
• Quantum networks based on color centers in diamond
• An integrated nanophotonic quantum register based on silicon-vacancy spins in diamond
• Phonon networks with SiV centers in diamond waveguides
• Inverse-Designed Diamond Photonics
• A fiber-coupled diamond quantum nanophotonic interface
• Strongly Cavity-Enhanced Spontaneous Emission from Silicon-Vacancy Centers in Diamond
• Cavity quantum electrodynamics with color centers in diamond
• A Quantum Photonic Interface for Tin-Vacancy Centers in Diamond
• Coupling of a Single Tin-vacancy Center to a Photonic Crystal Cavity in Diamond
• Diamond Integrated Quantum Photonics: A Review
• Generation of Tin-Vacancy Centers in Diamond via Shallow Ion Implantation and Subsequent Diamond Overgrowth
• Two-Dimensional Photonic Crystal Slab Nanocavities on Bulk Single-Crystal Diamond
• Realizing $Q$ > 300,000 in diamond microdisks for optomechanics via etch optimization
• Narrow-linewidth tin-vacancy centers in a diamond waveguide
• Integrated Single Photon Emitters
• Crystallographic Orientation Dependent Reactive Ion Etch in Single Crystal Diamond
• Indistinguishable Single-Photon Sources with Dissipative Emitter Coupled to Cascaded Cavities
• Quantum Photonic Circuits Integrated with Color Centers in Designer Nanodiamonds
• Development of hard masks for reactive ion beam angled etching of diamond
• A Fiber-coupled Scanning Magnetometer with Nitrogen-Vacancy Spins in a Diamond Nanobeam
• Nonlinear Quantum Photonics with a Tin-Vacancy Center Coupled to a One-Dimensional Diamond Waveguide
• Integrated Photonic Platforms for Quantum Technology: A Review
• 'Sawfish' Photonic Crystal Cavity for Near-Unity Emitter-to-Fiber Interfacing in Quantum Network Applications
• Coherent microwave, optical, and mechanical quantum control of spin qubits in diamond
• Recent Advances in Mechanical Torque Studies of Small-scale Magnetism
• High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2
• Fabrication of Sawfish photonic crystal cavities in bulk diamond
• A vertically-loaded diamond microdisk resonator spin-photon interface
• Fiber-taper collected emission from NV centers in high-$Q/V$ diamond microdisks
• Enhanced spin state readout of Nitrogen-Vacancy centers in diamond using IR fluorescence
• Homogeneous Free-Standing Nanostructures from Bulk Diamond over Millimeter Scales for Quantum Technologies
• Fresnel-type Solid Immersion Lens for efficient light collection from quantum defects in diamond
• Scalable construction of hybrid quantum photonic cavities
• A robust, fiber-coupled scanning probe magnetometer using electron spins at the tip of a diamond nanobeam
• Above-Unity Coherent Cooperativity of Tin-Vacancy Centers in Diamond Photonic Crystal Cavities
• Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane
• Optimization of diamond optomechanical crystal cavities
• High-efficiency vertical emission spin-photon interface for scalable quantum memories