Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane

Abstract

We demonstrate two-dimensional photonic crystal cavities operating at telecommunication wavelengths in a single-crystal diamond membrane. We use a high-optical-quality and thin (~ 300 nm) diamond membrane, supported by a polycrystalline diamond frame, to realize fully suspended two-dimensional photonic crystal cavities with a high theoretical quality factor of ~ $8\times 10^6$ and a relatively small mode volume of ~2$(\lambda /n{)}^3$. The cavities are fabricated in the membrane using electron-beam lithography and vertical dry etching. We observe cavity resonances over a wide wavelength range spanning the telecommunication O- and S-bands (1360 nm-1470 nm) with Q factors of up to ~1800. Our method offers a new direction for on-chip diamond nanophotonic applications in the telecommunication-wavelength range.

References in corpus (9)

• Single-Photon Switching and Entanglement of Solid-State Qubits in an Integrated Nanophotonic System
• High Quality factor photonic crystal nanobeam cavities
• High-Q optical nanocavities in bulk single-crystal diamond
• Coherent spin control of a nanocavity-enhanced qubit in diamond
• A quantum logic gate between a solid-state quantum bit and a photon
• Deterministic coupling of a single silicon-vacancy color center to a photonic crystal cavity in diamond
• Coherent Acoustic Control of a Single Silicon Vacancy Spin in Diamond
• Fabrication of Ultrathin Single-Crystal Diamond Membranes
• Coupling of a Single Tin-vacancy Center to a Photonic Crystal Cavity in Diamond