Fabrication of Ultrathin Single-Crystal Diamond Membranes
arXiv:1608.08914 · doi:10.1002/adma.200801460
Abstract
We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a significant enabling technology for nanomechanical and photonic structures incorporating colour-centres. The process uses a novel double implant process, annealing and chemical etching to produce membranes of diamond from single-crystal starting material, the thinnest layers achieved to date are 210 nm thick.
arXiv comment21 pages, 4 figures
References in corpus (14)
- Strongly Interacting Polaritons in Coupled Arrays of Cavities
- Quantum phase transitions of light
- Efficient high-fidelity quantum computation using matter qubits and linear optics
- Photon blockade induced Mott transitions and XY spin models in coupled cavity arrays
- Nonclassical radiation from diamond nanocrystals
- Cavity QED with Diamond Nanocrystals and Silica Microspheres
- Stable single photon source in near infrared
- Fabrication and Characterization of Two-Dimensional Photonic Crystal Microcavities in Nanocrystalline Diamond
- Brokered Graph State Quantum Computing
- Dissipation in Nanocrystalline-Diamond Nanomechanical Resonators
- Characterization of Three-Dimensional Microstructures in Single Crystal Diamond
- Towards a picosecond transform-limited nitrogen-vacancy based single photon source
- Diamond chemical vapor deposition on optical fibers for fluorescence waveguiding
- The Photonic Module: an on-demand resource for photonic entanglement
Cited by in corpus (38)
- A Diamond Nanowire Single Photon Antenna
- Diamond Nanophotonics
- Quantum networks based on color centers in diamond
- One- and two-dimensional photonic crystal micro-cavities in single crystal diamond
- Cavity quantum electrodynamics with color centers in diamond
- Tailoring spin defects in diamond
- Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers
- Design and Focused Ion Beam Fabrication of Single Crystal Diamond Nanobeam Cavities
- Coupling of silicon-vacancy centers to a single crystal diamond cavity
- Nanomechanical resonant structures in single-crystal diamond
- Single crystal diamond nanobeam waveguide optomechanics
- Two-Dimensional Photonic Crystal Slab Nanocavities on Bulk Single-Crystal Diamond
- Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes
- Design of flexible ultrahigh-Q microcavities in diamond-based photonic crystal slabs
- Quantum micro-nano devices fabricated in diamond by femtosecond laser and ion irradiation
- Evidence of light guiding in ion-implanted diamond
- Bottom-up Engineering of Diamond Nanostructures
- Direct measurement and modelling of internal strains in ion-implanted diamond
- Slot-waveguide cavities for optical quantum information applications
- Softening the ultra-stiff: controlled variation of Young's modulus in single crystal diamond
- Modification of the structure of diamond with MeV ion implantation
- Production yield of rare-earth ions implanted into an optical crystal
- Structural transformation of implanted diamond layers during high temperature annealing
- Complex refractive index variation in proton-damaged diamond
- Single photon quantum non-demolition in the presence of inhomogeneous broadening
- Optical properties of silicon-implanted polycrystalline diamond membranes
- Optical and electronic properties of sub-surface conducting layers in diamond created by MeV B-implantation at elevated temperatures
- Characterization of the recovery of mechanical properties of ion-implanted diamond after thermal annealing
- An analytical model for the mechanical deformation of locally graphitized diamond
- Design of microcavities in diamond-based photonic crystals by Fourier- and real-space analysis of cavity fields
- Micro-beam and pulsed laser beam techniques for the micro-fabrication of diamond surface and bulk structures
- Review Article: Quantum Nanophotonics in Diamond
- Optical Nano-antennas
- Travelling Surface Plasmons with Interference Envelope and A Vision for Time Crystals
- Laser-cut Patterned, Micrometer-thin Diamond Membranes with Coherent Color Centers for Open Microcavities
- Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing
- Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane
- Processing of Photonic Crystal Nanocavity for Quantum Information in Diamond