Complex refractive index variation in proton-damaged diamond

Abstract

An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 10^15 - 10^17 cm^-2). After implanting in 125x125 um^2 areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated.

13 pages, 7 figures. arXiv admin note: text overlap with arXiv:1608.07122

References in corpus (6)

• Fabrication and Characterization of Two-Dimensional Photonic Crystal Microcavities in Nanocrystalline Diamond
• Fabrication of Ultrathin Single-Crystal Diamond Membranes
• Characterization of Three-Dimensional Microstructures in Single Crystal Diamond
• Evidence of light guiding in ion-implanted diamond
• Controlled variation of the refractive index in ion-damaged diamond
• Spectroscopic measurement of the refractive index of ion-implanted diamond

Cited by in corpus (4)

• Raman spectroscopic features of the neutral vacancy in diamond from ab initio quantum-mechanical calculations
• Development and characterization of a diamond-insulated graphitic multi electrode array realized with ion beam lithography
• An analytical model for the mechanical deformation of locally graphitized diamond
• Micro-beam and pulsed laser beam techniques for the micro-fabrication of diamond surface and bulk structures