Crystallographic Orientation Dependent Reactive Ion Etch in Single Crystal Diamond
arXiv:2004.03423 · doi:10.1002/adma.201705501
Abstract
Sculpturing desired shapes in single crystal diamond is ever more crucial in the realization of complex devices for nanophotonics, quantum computing, and quantum optics. The crystallographic orientation dependent wet etch of single crystalline silicon in potassium hydroxide (KOH) allows a range of shapes formed and has significant impacts on MEMS (microelectromechanical systems), AFM (atomic force microscopy), and microfluidics. Here, a crystal direction dependent dry etching principle in an inductively-coupled plasma reactive ion etcher is presented, which allows to selectively reveal desired crystal planes in monocrystalline diamond by controlling the etching conditions. The principle is demonstrated when the kinetic energy of incident ions on diamond surfaces is reduced below a certain threshold leading to anisotropic etching and faceting along specific crystal planes. Using the principle, monolithic diamond nanopillars for magnetometry using nitrogen vacancy centers are fabricated. In these nanopillars, a half-tapering angle up to 21° is achieved, the highest angle reported, which leads to a high photon efficiency and high mechanical strength of the nanopillar. These results represent the first demonstration of crystallographic orientation dependent reactive ion etch principle, which opens a new window for shaping specific nanostructures which is at the heart of nanotechnology. It is believed that this principle will prove to be valuable for structuring and patterning of other single crystal materials as well.
This is pre-print version. Submission version for Advanced materials publication http://doi.wiley.com/10.1002/adma.201705501
References in corpus (22)
- Experimental loophole-free violation of a Bell inequality using entangled electron spins separated by 1.3 km
- High-sensitivity diamond magnetometer with nanoscale resolution
- Single-Photon Switching and Entanglement of Solid-State Qubits in an Integrated Nanophotonic System
- A Diamond Nanowire Single Photon Antenna
- Observation of coherent oscillation of a single nuclear spin and realization of a two-qubit conditional quantum gate
- A robust, scanning quantum system for nanoscale sensing and imaging
- Nanoscale magnetic imaging of a single electron spin under ambient conditions
- Anisotropic interactions of a single spin and dark-spin spectroscopy in diamond
- All-optical initialization, readout, and coherent preparation of single silicon-vacancy spins in diamond
- Strongly enhanced photon collection from diamond defect centres under micro-fabricated integrated solid immersion lenses
- Sub-nanometer resolution in three-dimensional magnetic-resonance imaging of individual dark spins
- Control and Local Measurement of the Spin Chemical Potential in a Magnetic Insulator
- High-Q optical nanocavities in bulk single-crystal diamond
- Coherent spin control of a nanocavity-enhanced qubit in diamond
- Fabrication of all diamond scanning probes for nanoscale magnetometry
- Nano-engineered Diamond Waveguide as a Robust Bright Platform for Nanomagnetometry Using Shallow Nitrogen Vacancy Centers
- Microscopic diamond Solid-Immersion-Lenses fabricated around single defect ceneters by focussed ion beam milling
- Rectangular Photonic Crystal Nanobeam Cavities in Bulk Diamond
- Photonic nano-structures on (111) oriented diamond
- Nanomechanical resonant structures in single-crystal diamond
- Superconducting Nanowire Single Photon Detector on Diamond
- Fabrication of Triangular Nanobeam Waveguide Networks in Bulk diamond Using Single-Crystal Silicon Hard Masks
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