Titanium Nitride Films for Ultrasensitive Microresonator Detectors

Abstract

Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, ρ_n ~ 100 $\mu$Ohm cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Q_i > 10^7) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10-200 $\mu$s. TiN microresonators should therefore reach sensitivities well below 10^-19 WHz^(-1/2).

to be published in APL

References in corpus (7)

• A semi-empirical model for two-level system noise in superconducting microresonators
• Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators
• Quasiparticle relaxation in optically excited high-Q superconducting resonators
• Temperature Dependence of the Frequency and Noise of Superconducting Coplanar Waveguide Resonators
• Two-level system noise reduction for Microwave Kinetic Inductance Detectors
• Enhancement of quasiparticle recombination in Ta and Al superconductors by implantation of magnetic and nonmagnetic atoms
• Titanium Nitride - a correlated metal at the threshold of a Mott transition

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