High-kinetic inductance NbN films for high-quality compact superconducting resonators

Abstract

Niobium nitride (NbN) is a particularly promising material for quantum technology applications, as entails the degree of reproducibility necessary for large-scale of superconducting circuits. We demonstrate that resonators based on NbN thin films present a one-photon internal quality factor above 10${}^5$ maintaining a high impedance (larger than 2k$\Omega$), with a footprint of approximately 50x100 $\mu$m${}^2$ and a self-Kerr nonlinearity of few tenths of Hz. These quality factors, mostly limited by losses induced by the coupling to two-level systems, have been maintained for kinetic inductances ranging from tenths to hundreds of pH/square. We also demonstrate minimal variations in the performance of the resonators during multiple cooldowns over more than nine months. Our work proves the versatility of niobium nitride high-kinetic inductance resonators, opening perspectives towards the fabrication of compact, high-impedance and high-quality multimode circuits, with sizable interactions.

12 pages, 8 figures

References in corpus (8)

• Efficient and robust analysis of complex scattering data under noise in microwave resonators
• Implementation of low-loss superinductances for quantum circuits
• Strong Coupling Cavity QED with Gate-Defined Double Quantum Dots Enabled by a High Impedance Resonator
• Superconducting properties and Hall Effect of epitaxial NbN thin films
• Extensible quantum simulation architecture based on atom-photon bound states in an array of high-impedance resonators
• A near-ideal degenerate parametric amplifier
• Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators
• Quantum Sensors for Microscopic Tunneling Systems

Cited by in corpus (17)

• Three-Wave Mixing Quantum-Limited Kinetic Inductance Parametric Amplifier operating at 6 Tesla and near 1 Kelvin
• Low loss hybrid Nb/Au superconducting resonators for quantum circuit applications
• Strong Charge-Photon Coupling in Planar Germanium Enabled by Granular Aluminium Superinductors
• Superconducting nitridized-aluminum thin films
• Band engineering and study of disorder using topology in compact high kinetic inductance cavity arrays
• High-impedance resonators for strong coupling to an electron on helium
• Reversing Hydrogen-Related Loss in $\alpha$-Ta Thin Films for Quantum Device Fabrication
• Temperature dependence of microwave losses in lumped-element resonators made from superconducting nanowires with high kinetic inductance
• Kinetic inductance coupling for circuit QED with spins
• Atomic layer etching of niobium nitride using sequential exposures of O${}_2$ and H${}_2$/SF${}_6$ plasmas
• High Impedance Granular Aluminum Ring Resonators
• Localized quasiparticles in a fluxonium with quasi-two-dimensional amorphous kinetic inductors
• Study of Magnetic Field Resilient High Impedance High-Kinetic Inductance Superconducting Resonators
• Encapsulation epitaxy of air-stable monolayer superconducting films for quantum circuits and qubits
• Improving the accuracy of circuit quantization using the electromagnetic properties of superconductors
• Effects of the thin-film thickness on superconducting NbTi microwave resonators for on-chip cryogenic thermometry
• Stacked Josephson junctions for quantum circuit applications