High Impedance Granular Aluminum Ring Resonators

Abstract

Superconducting inductors with impedance surpassing the resistance quantum, i.e., superinductors, are important for quantum technologies because they enable the development of protected qubits, enhance coupling to systems with small electric dipole moments, and facilitate the study of phase-slip physics. We demonstrate superinductors with densely packed meandered traces of granular aluminum (grAl) with inductances up to $4\mu \mathrm{H}$, achieving impedances exceeding $100\mathrm{k}\Omega$ in the $4-8\mathrm{GHz}$ range. Ring resonators made with grAl meandered superinductors exhibit quality factors on the order of $10^5$ in the single-photon regime and low non-linearity on the order of tens of $\mathrm{Hz}$. Depending on the grAl resistivity, at $10\mathrm{Hz}$, we measure frequency noise spectral densities in the range of $10^2$ to $10^3\mathrm{Hz}/\sqrt{\mathrm{Hz}}$. In some devices, in the single-photon regime, we observe a positive Kerr coefficient of unknown origin. Using more complex fabrication, the devices could be released from the substrate, either freestanding or suspended on a membrane, thereby further improving their impedance by a factor of three.

16 pages including Supplementary Information, 9 figures

References in corpus (52)

• Fluxonium: single Cooper pair circuit free of charge offsets
• Semiconductor Spin Qubits
• A Semiconductor Nanowire-Based Superconducting Qubit
• High Kinetic Inductance Superconducting Nanowire Resonators for Circuit QED in a Magnetic Field
• Tunable superconducting nanoinductors
• Implementation of low-loss superinductances for quantum circuits
• Granular aluminum: A superconducting material for high impedance quantum circuits
• Correlating decoherence in transmon qubits: Low frequency noise by single fluctuators
• Protected gates for superconducting qubits
• Quasiparticle dynamics in granular aluminum close to the superconductor to insulator transition
• Low Loss Superconducting Titanium Nitride Coplanar Waveguide Resonators
• Circuit Quantum Electrodynamics of Granular Aluminum Resonators
• Experimental realization of an intrinsically error-protected superconducting qubit
• Suppressing relaxation in superconducting qubits by quasiparticle pumping
• Nontopological zero-bias peaks in full-shell nanowires induced by flux tunable Andreev states
• High Kinetic Inductance NbN Nanowire Superinductors
• Evidence for coherent quantum phase-slips across a Josephson junction array
• Magnetic field resilient superconducting coplanar waveguide resonators for hybrid cQED experiments
• Shaping a superconducting dome: Enhanced Cooper-pairing versus suppressed phase coherence in coupled aluminum nanograins
• Phonon traps reduce the quasiparticle density in superconducting circuits
• The superconducting quasicharge qubit
• Atomic layer deposition of titanium nitride for quantum circuits
• Evolution of Nanowire Transmons and Their Quantum Coherence in Magnetic Field
• Scalable High-Performance Fluxonium Quantum Processor
• Coupling a superconducting quantum circuit to a phononic crystal defect cavity
• Coherence properties of the 0-$\pi$ qubit
• Quantized current steps due to the a.c. coherent quantum phase-slip effect
• Interplay between kinetic inductance, non-linearity and quasiparticle dynamics in granular aluminum MKIDs
• Bifluxon: Fluxon-Parity-Protected Superconducting Qubit
• Implementation of a transmon qubit using superconducting granular aluminum
• Single Quasiparticle Trapping in Aluminum Nanobridge Josephson Junctions
• Electrodynamics of granular aluminum from superconductor to insulator: observation of collective superconducting modes
• Surpassing the resistance quantum with a geometric superinductor
• A gate-tunable, field-compatible fluxonium
• Fano Interference in Microwave Resonator Measurements
• Noise and loss of superconducting aluminium resonators at single photon energies
• Granular Aluminum Meandered Superinductors for Quantum Circuits
• Strong tunable coupling between two distant superconducting spin qubits
• High-kinetic inductance NbN films for high-quality compact superconducting resonators
• Revealing the nonlinear response of a tunneling two-level system ensemble using coupled modes
• Geometric superinductance qubits: Controlling phase delocalization across a single Josephson junction
• Acoustic spectral hole-burning in a two-level system ensemble
• An argon ion beam milling process for native ${\text{AlO}}_{\text{x}}$ layers enabling coherent superconducting contacts
• Planar Superconducting Whispering Gallery Mode Resonators
• Probing a two-level system bath via the frequency shift of an off-resonantly-driven cavity
• Magnetic field robust high quality factor NbTiN superconducting microwave resonators
• Strong Charge-Photon Coupling in Planar Germanium Enabled by Granular Aluminium Superinductors
• Demonstration of dual Shapiro steps in small Josephson junctions
• Ultrahigh-inductance materials from spinodal decomposition
• Random telegraph fluctuations in granular microwave resonators
• Magnetic Field Tolerant Superconducting Spiral Resonators for Circuit QED
• Exploring van der Waals cuprate superconductors using a hybrid microwave circuit