High Kinetic Inductance Microwave Resonators Made by He-Beam Assisted Deposition of Tungsten Nanowires

Abstract

We evaluate the performance of hybrid microwave resonators made by combining sputtered Nb thin films with Tungsten nanowires grown with a He-beam induced deposition technique. Depending on growth conditions the nanowires have a typical width $w\in [35-75]$~nm and thickness $t\in [5-40]$~nm. We observe a high normal state resistance $R_{sq}\in [65-150]$ $\Omega /sq$ which together with a critical temperature $T_c\in [4-6]K$ ensure a high kinetic inductance making the resonator strongly nonlinear. Both lumped and coplanar waveguide resonators were fabricated and measured at low temperature exhibiting internal quality factors up to $3990$ at $4.5$~GHz in the few photon regime. Analyzing the wire length, temperature and microwave power dependence we extracted a kinetic inductance for the W nanowire of $L_K\approx 15$ pH/sq, which is 250 times higher than the geometrical inductance, and a Kerr non-linearity as high as $K_{W,He}/2\pi =200\pm 120$~Hz/photon at $4.5$~GHz. The nanowires made with the helium focused ion beam are thus versatile objects to engineer compact, high impedance, superconducting environments with a mask and resist free direct write process.

References in corpus (33)

• Fluxonium: single Cooper pair circuit free of charge offsets
• Disorder-Induced Inhomogeneities of the Superconducting State Close to the Superconductor-Insulator Transition
• Coherent quantum phase slip
• Role of Spatial Amplitude Fluctuations in Highly Disordered s-Wave Superconductors
• High Kinetic Inductance Superconducting Nanowire Resonators for Circuit QED in a Magnetic Field
• An analysis method for asymmetric resonator transmission applied to superconducting devices
• Tunable superconducting nanoinductors
• Coherent spin-qubit photon coupling
• Titanium Nitride Films for Ultrasensitive Microresonator Detectors
• Strong Coupling Cavity QED with Gate-Defined Double Quantum Dots Enabled by a High Impedance Resonator
• Study of loss in superconducting coplanar waveguide resonators
• Coherent coupling of a single spin to microwave cavity photons
• Quasiparticle dynamics in granular aluminum close to the superconductor to insulator transition
• Direct observation of melting in a 2-D superconducting vortex lattice
• Circuit Quantum Electrodynamics of Granular Aluminum Resonators
• Focused-ion-beam-induced deposition of superconducting nanowires
• Strongly disordered TiN and NbTiN s-wave superconductors probed by microwave electrodynamics
• Ballistic edge states in Bismuth nanowires revealed by SQUID interferometry
• Realization of a $\Lambda$ system with metastable states of a capacitively-shunted fluxonium
• Operation of a titanium nitride superconducting microresonator detector in the nonlinear regime
• Protecting a superconducting qubit from energy decay by selection rule engineering
• Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators
• Proximity Induced Superconductivity and Multiple Andreev Reflections in Few-Layer-Graphene
• Atomic layer deposition of titanium nitride for quantum circuits
• Proximity Effect in a Superconductor-Metallofullerene-Superconductor Molecular Junction
• Electrodynamic response and local tunnelling spectroscopy of strongly disordered superconducting TiN films
• Geometry-related magnetic interference patterns in long SNS Josephson junctions
• Tunable microwave impedance matching to a high impedance source using a Josephson metamaterial
• Fock-state stabilization and emission in superconducting circuits using dc-biased Josephson junctions
• Superconducting nanowires by electron-beam-induced deposition
• Finite quasiparticle lifetime in disordered superconductors
• Superconducting-semiconductor quantum devices: from qubits to particle detectors
• Niobium Silicon alloys for Kinetic Inductance Detectors

Cited by in corpus (7)

• Superconducting granular aluminum resonators resilient to magnetic fields up to 1 Tesla
• Nonlinearity and Parametric Amplification of Superconducting Nanowire Resonators in Magnetic Field
• Kinetic Inductive Electromechanical Transduction for Nanoscale Force Sensing
• A Scalable Cryogenic LED Module for Selectively Illuminating Kinetic Inductance Detector Arrays
• Design, fabrication and characterization of kinetic-inductive force sensors for scanning probe applications
• Compact Itinerant Microwave Photonics with Superconducting High-Kinetic Inductance Microstrips
• Stacked Josephson junctions for quantum circuit applications