A CMOS compatible platform for high impedance superconducting quantum circuits

Abstract

Aluminium based platforms have allowed to reach major milestones for superconducting quantum circuits. For the next generation of devices, materials that are able to maintain low microwave losses while providing new functionalities, such as large kinetic inductance or compatibility with CMOS platform are sought for. Here we report on a combined direct current (DC) and microwave investigation of titanium nitride lms of dierent thicknesses grown using CMOS compatible methods. For microwave resonators made of TiN lm of thickness $\sim$3 nm, we measured large kinetic inductance LK $\sim$ 240 pH/sq, high mode impedance of $\sim$ 4.2 k$\Omega$ while maintaining microwave quality factor $\sim$ 10^5 in the single photon limit. We present an in-depth study of the microwave loss mechanisms in these devices that indicates the importance of quasiparticles and provide insights for further improvement.

References in corpus (24)

• Supplementary information for "Quantum supremacy using a programmable superconducting processor"
• Ultrastrong coupling regimes of light-matter interaction
• Fluxonium: single Cooper pair circuit free of charge offsets
• Spectral signatures of many-body localization with interacting photons
• Disorder-Induced Inhomogeneities of the Superconducting State Close to the Superconductor-Insulator Transition
• A Dissipatively Stabilized Mott Insulator of Photons
• Surface participation and dielectric loss in superconducting qubits
• Coherent quantum phase slip
• High Kinetic Inductance Superconducting Nanowire Resonators for Circuit QED in a Magnetic Field
• Titanium Nitride Films for Ultrasensitive Microresonator Detectors
• Implementation of low-loss superinductances for quantum circuits
• Protected gates for superconducting qubits
• Quasiparticle dynamics in granular aluminum close to the superconductor to insulator transition
• Low Loss Superconducting Titanium Nitride Coplanar Waveguide Resonators
• Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators
• Quantum Superinductor with Tunable Non-Linearity
• Nanowire Superinductance Fluxonium Qubit
• Shaping a superconducting dome: Enhanced Cooper-pairing versus suppressed phase coherence in coupled aluminum nanograins
• Phonon traps reduce the quasiparticle density in superconducting circuits
• Implementation of a transmon qubit using superconducting granular aluminum
• Electrodynamic response and local tunnelling spectroscopy of strongly disordered superconducting TiN films
• Kerr non-linearity in a superconducting Josephson metamaterial
• Effect of dimensionality on the vortex-dynamics in type-II superconductor
• Material matters in superconducting qubits