Engineering the dissipation of crystalline micromechanical resonators

Abstract

High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are particularly attractive for such resonators due to their prospects for high quality, intrinsic stress and yield strength, and low dissipation. However, when grown on a silicon substrate, interfacial defects arising from lattice mismatch with the substrate have been postulated to introduce additional dissipation. Here, we develop a new backside etching process for single crystal silicon carbide microresonators that allows us to quantitatively verify this prediction. By engineering the geometry of the resonators and removing the defective interfacial layer, we achieve quality factors exceeding a million in silicon carbide trampoline resonators at room temperature, a factor of five higher than without the removal of the interfacial defect layer. We predict that similar devices fabricated from ultrahigh purity silicon carbide and leveraging its high yield strength, could enable room temperature quality factors as high as $6\times 10^9$

arXiv comment9 pages 5 figures

References in corpus (22)

• Thermoelastic Damping in Micro- and Nano-Mechanical Systems
• Measurement-based quantum control of mechanical motion
• Ultra-coherent nanomechanical resonators via soft clamping and dissipation dilution
• Single-Crystal Diamond Nanomechanical Resonators with Quality Factors exceeding one Million
• Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature
• Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency
• Dynamic manipulation of mechanical resonators in the high amplitude regime through optical backaction
• Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
• Minimization of phonon-tunneling dissipation in mechanical resonators
• Precision ultrasound sensing on a chip
• Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators
• Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
• Improved noninterferometric test of collapse models using ultracold cantilevers
• Cavity optomechanics with ultra-high Q crystalline micro-resonators
• Single-molecule optical absorption imaging by nanomechanical photothermal sensing at room temperature
• Generalized dissipation dilution in strained mechanical resonators
• Clamp-tapering increases the quality factor of stressed nanobeams
• High-Q optomechanical GaAs nanomembranes
• Stress control of tensile-strained In${}_{1-x}$Ga${}_x$P nanomechanical string resonators
• Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators
• Tensile strained $I{n}_{x}G{a}_{1-x}P$ membranes for cavity optomechanics
• Propagation and imaging of mechanical waves in a highly-stressed single-mode phononic waveguide

Cited by in corpus (21)

• Strained crystalline nanomechanical resonators with ultralow dissipation
• Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning
• Nanomechanical Dissipation and Strain Engineering
• High-Strength Amorphous Silicon Carbide for Nanomechanics
• Effect of deep-defect excitation on mechanical energy dissipation of single-crystal diamond
• Towards cavity-free ground state cooling of an acoustic-frequency silicon nitride membrane
• High-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics
• Integrated microcavity optomechanics with a suspended photonic crystal mirror above a distributed Bragg reflector
• Degeneracy-breaking and Long-lived Multimode Microwave Electromechanical Systems Enabled by Cubic Silicon-Carbide Membrane Crystals
• Tunnelling of transverse acoustic waves on a silicon chip
• Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics
• Universal length dependence of tensile stress in nanomechanical string resonators
• Low-Dissipation Nanomechanical Devices from Monocrystalline Silicon Carbide
• Thickness dependence of the mechanical properties of piezoelectric high-$Q_m$ nanomechanical resonators made from aluminium nitride
• Oxide Membranes from Bulk Micro-Machining of SrTiO${}_3$ substrates
• Cavity Optomechanical Probe of Gravity Between Massive Mechanical Oscillators
• Three robust temperature-drift compensation strategies for a MEMS gravimeter
• Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films
• High-$Q$ membrane resonators using ultra-high-stress crystalline TiN films
• Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors
• Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators